Optical readout method based on time-discrete modulation for micro-cantilever array sensing

Xuhong Chu; Liquan Dong; Yuejin Zhao; Xiaomei Yu; Yun Feng

doi:10.3788/COL201614.101102

Chinese Optics Letters, Volume. 14, Issue 10, 101102(2016)

Optical readout method based on time-discrete modulation for micro-cantilever array sensing

Xuhong Chu¹, Liquan Dong^1、*, Yuejin Zhao¹, Xiaomei Yu², and Yun Feng¹

¹Beijing Key Lab. for Precision Optoelectronic Measurement Instrument and Technology, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

²Institute of Microelectronics, Peking University, Beijing 100087, China

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Fig. 1. (a) FPA and its pixel and (b) the bi-material micro-cantilever structure of an FPA pixel.

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Fig. 2. Time-discrete modulation optical readout IR FPA imaging system.

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Fig. 3. Mechanical chopper.

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Fig. 4. Chopper wheel and its motor drive unit.

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Fig. 5. Images of a hot iron captured by the optical readout IR FPA imaging system (a,b) without time-discrete modulation and (c) with time-discrete modulation.

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Fig. 6. Image sequence of a hot iron captured by the optical readout IR FPA imaging system without time-discrete modulation.

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Fig. 7. Image sequence of a hot iron captured by the optical readout IR FPA imaging system with time-discrete modulation.

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Table 1. Calculated Values of NETD
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Table 1. Calculated Values of NETD
Fig. 5(a) Fig. 5(b) Fig. 5(c)
Value Mean Value Mean Value Mean
$G_{\max 1}$ 98 98 163 165.3 160 161
$G_{\max 2}$ 92 176 156
$G_{\max 3}$ 104 157 167
$G_{n 1}$ 21 20 36 36.3 4.1 3.1
$G_{n 2}$ 24 30 2.3
$G_{n 3}$ 15 43 2.8
NETD $Δ T \times k \times 0.204$ $Δ T \times k \times 0.219$ $Δ T \times k \times 0.019$

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Xuhong Chu, Liquan Dong, Yuejin Zhao, Xiaomei Yu, Yun Feng, "Optical readout method based on time-discrete modulation for micro-cantilever array sensing," Chin. Opt. Lett. 14, 101102 (2016)

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