Optics and Precision Engineering, Volume. 19, Issue 4, 828(2011)
Combined profilometer for ultra-precision surface topography
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WANG Shu-zhen, XIE Tie-bang, CHANG Su-ping. Combined profilometer for ultra-precision surface topography[J]. Optics and Precision Engineering, 2011, 19(4): 828
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Received: Jun. 2, 2010
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: WANG Shu-zhen (ly_wsz@163.com)