Optics and Precision Engineering, Volume. 19, Issue 4, 828(2011)

Combined profilometer for ultra-precision surface topography

WANG Shu-zhen1,2、*, XIE Tie-bang1, and CHANG Su-ping1
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    WANG Shu-zhen, XIE Tie-bang, CHANG Su-ping. Combined profilometer for ultra-precision surface topography[J]. Optics and Precision Engineering, 2011, 19(4): 828

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    Paper Information

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    Received: Jun. 2, 2010

    Accepted: --

    Published Online: Jun. 14, 2011

    The Author Email: WANG Shu-zhen (ly_wsz@163.com)

    DOI:10.3788/ope.20111904.0828

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