A combined profilometer combined atomic force probe scanning measurement with non-contact optical measurement based on one interference microscope substrate was developed for ultra-precision surface topography. The white light interference microscope based atomic force probe scanning measurement, the relationship between the deflection of an atomic force probe cantilever and the movement amount of interference fringes and the nonlinearity error correction method of probe cantilever deflection measurement were given.Then, the contact operation mode combined the displacement of vertical scanning system and the deflection of the cantilever was analyzed.A 3D precision displacement system and a AFM head based on white light interference microscope were developed. Under the same condition, the calibration grating TGZ2_PTB(107±2nm) made by NT-MDT Co., was measured 10 times on the same region. The measurement results show that the standard deviation is 0.96 nm and the relative repeatability error is 3.08%. Several examples measured by atomic force probe scanning method, phase-shifting interferometry and vertical scanning white light interference method were given, respectively.It concludes that the combined profilometer can be used to measure ultra-precision machining engineering surfaces, optical surfaces,and micro-nano geometric structures.