International Journal of Extreme Manufacturing, Volume. 6, Issue 1, 12004(2024)

Energy beam-based direct and assisted polishing techniques for diamond: A review

Zhuo Li1, Feng Jiang1,2、*, Zhengyi Jiang3, Zige Tian1, Tian Qiu1, Tao Zhang3,4, Qiuling Wen1, Xizhao Lu4, Jing Lu1, and Hui Huang2,4
Author Affiliations
  • 1Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, People’s Republic of China
  • 2State Key Laboratory of High Performance Tools, Huaqiao University, Xiamen 361021, People’s Republic of China
  • 3School of Mechanical, Materials, Mechatronic and Biomedical Engineering, University of Wollongong, Wollongong, NSW 2522, Australia
  • 4College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, People’s Republic of China
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    Diamond is a highly valuable material with diverse industrial applications, particularly in the fields of semiconductor, optics, and high-power electronics. However, its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond. To address these challenges, several polishing methods have been developed for both single crystal diamond (SCD) and polycrystalline diamond (PCD), including mechanical, chemical, laser, and ion beam processing methods. In this review, the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted. Specifically, various energy beam-based direct and assisted polishing technologies, such as laser polishing, ion beam polishing, plasma-assisted polishing, and laser-assisted polishing, are summarized. The current research progress, material removal mechanism, and influencing factors of each polishing technology are analyzed. Although some of these methods can achieve high material removal rates or reduce surface roughness, no single method can meet all the requirements. Finally, the future development prospects and application directions of different polishing technologies are presented.

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    Zhuo Li, Feng Jiang, Zhengyi Jiang, Zige Tian, Tian Qiu, Tao Zhang, Qiuling Wen, Xizhao Lu, Jing Lu, Hui Huang. Energy beam-based direct and assisted polishing techniques for diamond: A review[J]. International Journal of Extreme Manufacturing, 2024, 6(1): 12004

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    Paper Information

    Received: May. 3, 2023

    Accepted: --

    Published Online: Jul. 19, 2024

    The Author Email: Jiang Feng (jiangfeng@hqu.edu.cn)

    DOI:10.1088/2631-7990/acfd67

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