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Laser & Optoelectronics Progress, Volume. 57, Issue 17, 171205(2020)

Error Source and Spectrum Analysis for Angle Measurement of Circular Grating Encoder

Xi Ren1,2,3, Shengping Du1,2,3、*, Ke Chen1,2,3, and Jihong Wang1,2,3
Author Affiliations
  • 1Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 101408, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (13)
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    References (18)
    Cited By (5)
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    Figures & Tables(13)
    Diagram of circular grating encoder

    Fig. 1. Diagram of circular grating encoder

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    Principle of angle measurement of circular grating encoder

    Fig. 2. Principle of angle measurement of circular grating encoder

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    Installation eccentricity error of circular grating encoder

    Fig. 3. Installation eccentricity error of circular grating encoder

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    Ellipse error of circular grating encoder

    Fig. 4. Ellipse error of circular grating encoder

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    Diagrams of bearing motion error. (a) Horizontal movement; (b) vertical movement; (c) movement at δ

    Fig. 5. Diagrams of bearing motion error. (a) Horizontal movement; (b) vertical movement; (c) movement at δ

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    Distribution of four reading heads

    Fig. 6. Distribution of four reading heads

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    Time domain analysis of single reading head error. (a) H0; (b) H1; (c) H2; (d) H3

    Fig. 7. Time domain analysis of single reading head error. (a) H0; (b) H1; (c) H2; (d) H3

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    Frequency domain analysis of measured error of single reading head

    Fig. 8. Frequency domain analysis of measured error of single reading head

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    Time domain analysis of measured error of double reading head

    Fig. 9. Time domain analysis of measured error of double reading head

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    Frequency domain analysis of measured error of double reading head

    Fig. 10. Frequency domain analysis of measured error of double reading head

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    Time domain result of measured error of four reading heads

    Fig. 11. Time domain result of measured error of four reading heads

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    Frequency domain result of measured error of four reading heads

    Fig. 12. Frequency domain result of measured error of four reading heads

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    • Table 1. Specifications for graduation accuracy in actual circular grating system

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      Table 1. Specifications for graduation accuracy in actual circular grating system

      Nominal externaldiameter /mmGraduationaccuracy /(″)Nominal externaldiameter /mmGraduationaccuracy /(″)
      52±4.0200±1.0
      57±3.6206±1.0
      75±2.8209±1.0
      100±2.1229±0.9
      103±2.0255±0.8
      104±2.0300±0.7
      115±1.8350±0.6
      150±1.4413±0.5
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    Xi Ren, Shengping Du, Ke Chen, Jihong Wang. Error Source and Spectrum Analysis for Angle Measurement of Circular Grating Encoder[J]. Laser & Optoelectronics Progress, 2020, 57(17): 171205

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 14, 2020

    Accepted: Apr. 3, 2020

    Published Online: Sep. 1, 2020

    The Author Email: Shengping Du (du_shengping@163.com)

    DOI:10.3788/LOP57.171205

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology