Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312013(2023)

Surface Topography Measurement Technology Based on Optical Frequency Comb

Guanhao Wu†、*, Liheng Shi1、†, and Erge Li
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
  • show less
    Figures & Tables(11)
    Principle of an optical frequency comb[30], where the carrier-envelope phase is Δϕ=2πf0/frep
    Venation of optical-frequency-comb-based profilometry
    Schematic of frequency-comb-referenced scheme of multi-wavelength interferometer[51]
    Time-of-flight (TOF) ranging based on OMPD[44], in the PLL (in the red box), the reference optical frequency comb is used to construct a low-noise RF source, and out-of-loop (in the blue box) is used for TOF ranging
    Line-scan spectrum-encoded dual-comb interferometry[47]
    Coherent scanning interference profilometry based on scanning optical frequency comb repetition frequency[77]
    Principle of surface topography reconstruction by synthetic-wavelength-linked pulse alignment and carrier interference phase[82]
    Schematic of single pixel optical frequency comb profile measurement system based on DMD[90]
    One-shot three-dimensional imaging by spectral interferometry of a chirped optical frequency comb[42]. (a) Diagram of the experimental setup, in which the optical frequency comb spectrum and autocorrelation curve are shown in the upper left corner; (b) a fiber bundle probe consisting of 190 single-mode fibers is shown on the left, and the spectrum captured by the imaging spectrometer is shown on the right
    Principle of dual-comb digital holography[98]
    Comparison of representative comb-based topography measurement techniques, the test conditions of different works are not uniform
    Tools

    Get Citation

    Copy Citation Text

    Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 17, 2022

    Accepted: Jan. 6, 2023

    Published Online: Feb. 22, 2023

    The Author Email: Guanhao Wu (guanhaowu@mail.tsinghua.edu.cn)

    DOI:10.3788/LOP223339

    Topics