Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312013(2023)
Surface Topography Measurement Technology Based on Optical Frequency Comb
Fig. 1. Principle of an optical frequency comb[30], where the carrier-envelope phase is Δϕ=2πf0/frep
Fig. 3. Schematic of frequency-comb-referenced scheme of multi-wavelength interferometer[51]
Fig. 4. Time-of-flight (TOF) ranging based on OMPD[44], in the PLL (in the red box), the reference optical frequency comb is used to construct a low-noise RF source, and out-of-loop (in the blue box) is used for TOF ranging
Fig. 6. Coherent scanning interference profilometry based on scanning optical frequency comb repetition frequency[77]
Fig. 7. Principle of surface topography reconstruction by synthetic-wavelength-linked pulse alignment and carrier interference phase[82]
Fig. 8. Schematic of single pixel optical frequency comb profile measurement system based on DMD[90]
Fig. 9. One-shot three-dimensional imaging by spectral interferometry of a chirped optical frequency comb[42]. (a) Diagram of the experimental setup, in which the optical frequency comb spectrum and autocorrelation curve are shown in the upper left corner; (b) a fiber bundle probe consisting of 190 single-mode fibers is shown on the left, and the spectrum captured by the imaging spectrometer is shown on the right
Fig. 11. Comparison of representative comb-based topography measurement techniques, the test conditions of different works are not uniform
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Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013
Category: Instrumentation, Measurement and Metrology
Received: Dec. 17, 2022
Accepted: Jan. 6, 2023
Published Online: Feb. 22, 2023
The Author Email: Guanhao Wu (guanhaowu@mail.tsinghua.edu.cn)