Fig. 1. Operating principle and theoretical model of zero-mode waveguide devices zero-mode and micro-reflectors waveguide devices

Fig. 2. Simulation results of zero-mode waveguide devices with different structures

Fig. 3. Main process flow of zero-mode waveguide structure for micro-reflector

Fig. 4. Characterization of zero-mode waveguide device for micro-reflector

Fig. 5. Characterization of control zero-mode waveguide device

Fig. 6. Emission field intensity distribution of zero-mode waveguide device with three-segment micro-reflector

Fig. 7. Fluorescence test results of three zero-mode waveguide devices at different magnifications

Fig. 8. Comparison of fluorescence detection signal-to-noise ratio of two zero-mode waveguide devices