Optics and Precision Engineering, Volume. 33, Issue 7, 1091(2025)
Development of zero-mode waveguide device with micro-reflector for high signal-to-noise fluorescence detection
This study addresses the limitations of low signal collection efficiency and suboptimal signal-to-noise ratio in zero-mode waveguide (ZMW) devices employed for fluorescence detection. A micro-reflector ZMW device was designed and fabricated to enhance the signal-to-noise ratio in fluorescence measurements. Finite element electromagnetic simulations demonstrated a significant improvement in the spatial distribution and intensity of excitation and emission fields within the device. The ZMW apertures and a three-stage micro-reflector structure, with a height of 6.48 μm and a bottom diameter of 4.24 μm, were fabricated using a thick adhesive process followed by exposure etching, complemented by focused ion beam perforation and additional micro-nano fabrication techniques. Fluorescence performance was evaluated using fluorescent microspheres, and detection efficiency was assessed through fluorescence imaging. Quantitative analysis of grayscale intensity and signal-to-noise ratio revealed that the developed device achieved a fluorescence detection signal-to-noise ratio of 119.6, representing an approximate 4.27-fold enhancement compared to conventional ZMW devices without the micro-reflector. This high signal-to-noise ratio ZMW device demonstrates significant potential for applications in weak fluorescence detection and related fields.
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Xuanshuo LIU, Chuanyu LI, Chunxiao JIAO, Runhu HUANG, Lianqun ZHOU, Zhen GUO. Development of zero-mode waveguide device with micro-reflector for high signal-to-noise fluorescence detection[J]. Optics and Precision Engineering, 2025, 33(7): 1091
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Received: Feb. 24, 2025
Accepted: --
Published Online: Jun. 23, 2025
The Author Email: Lianqun ZHOU (zhoulq@sibet.ac.cn)