Laser & Optoelectronics Progress, Volume. 62, Issue 13, 1300006(2025)

Progress in Optical Measurement and Detection of Tin Droplets for Extreme Ultraviolet Lithography Light Sources

Liwen Fu1,2,3 and Nan Lin1,2,3、*
Author Affiliations
  • 1School of Advanced Interdisciplinary Sciences, University of Chinese Academy of Sciences, Beijing 100049, China
  • 2State Key Laboratory of Ultra-Intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3Department of Precision Optics Engineering, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    In high-end chip manufacturing, extreme ultraviolet (EUV) lithography has become indispensable for large-scale integrated circuit production, and is fundamental to the continued progress of future processing technologies. The laser-produced plasma (LPP)-EUV light source is a critical subsystem of EUV lithography machines, among which the liquid tin droplet generator is a key component. This generator must stably and continuously produce tin droplets of uniform size and spacing at a specific frequency to achieve a stable and efficient conversion efficiency (CE) under laser irradiation. Therefore, measurement and detection systems targeting tin droplet generation are essential for studying the droplet formation mechanism and interaction between droplets and lasers. Such systems play a crucial role in the development of LPP-EUV light sources by improving the droplet quality, increasing the optical CE, reducing debris generation, and ensuring source stability. Optical measurement, as the primary method of measurement and detection, lacks a systematic summary of its application in this field. This paper reviews the core metrics, key requirements, and current technological developments in the optical measurement and detection of tin droplet generators in EUV light sources. It provides a detailed analysis of the characteristics of mainstream measurement techniques and system solutions, which can serve as a technical reference and support for the development of tin droplet generation systems and research on LPP-EUV light sources.

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    Liwen Fu, Nan Lin. Progress in Optical Measurement and Detection of Tin Droplets for Extreme Ultraviolet Lithography Light Sources[J]. Laser & Optoelectronics Progress, 2025, 62(13): 1300006

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    Paper Information

    Category: Reviews

    Received: Dec. 9, 2024

    Accepted: Jan. 6, 2025

    Published Online: Jul. 15, 2025

    The Author Email: Nan Lin (nanlin@siom.ac.cn)

    DOI:10.3788/LOP242388

    CSTR:32186.14.LOP242388

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