Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 290(2024)

Design of Low Drift, Large Electromechanical Coupling SH-SAW Resonators

WEN Fujun1,2, WANG Yuanyuan1,2, QIAN Lirong1,2, WANG Litian1,2, LI Cuiping1,2, XIONG Yang1,2, TIAN Yahui3, and LI Honglang4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    References(15)

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    [2] [2] HSU T H, TSAI C H, TUNG S S, et al.Miniature LiNbO3/SiO2/Si SH-SAW resonators with near-spurious-free response[J].IEEE Electron Device Letters, 2023, 44(7): 1200-1203.

    [3] [3] LIU Y, CAI Y, ZHANG Y, et al.Materials, design, and characteristics of bulk acoustic wave resonator: A review[J].Micromachines, 2020, 11(7): 630.

    [4] [4] BOUSQUET M, PERREAU P, MAEDER-PACHURKA C, et al.Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters[C]∥[S.l.]:2020 IEEE International Ultrasonics Symposium (IUS), IEEE, 2020: 1-4.

    [5] [5] LU R, GONG S.RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook[J].Journal of Micromechanics and Microengineering, 2021, 31(11): 114001.

    [6] [6] HSU T H, TSENG K J, LI M H.Large coupling acoustic wave resonators based on LiNbO3/SiO2/Si functional substrate[J].IEEE Electron Device Letters, 2020, 41(12): 1825-1828.

    [7] [7] ZHOU H, ZHANG S, WU J, et al.Ultrawide-band SAW devices using SH0 mode wave with increased velocity for 5G front-ends[C]∥[S.l.]:2021 IEEE International Ultrasonics Symposium (IUS), IEEE, 2021: 1-4.

    [8] [8] XU H, FU S, SHEN J, et al.Large-range spurious mode elimination for wideband SAW filters on LiNbO3/SiO2/Si platform by LiNbO3 cut angle modulation[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2022, 69(11): 3117-3125.

    [9] [9] WU J, ZHANG S, ZHENG P, et al.Ultra-wideband MEMS filters using localized thinned 128°Y-cut thin-film lithium niobate[C]∥[S.l.]:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, 2023: 177-180.

    [10] [10] GUO Y, KADOTA M, TANAKA S.Serially connected strip-type acoustic wave resonator using X-40°Y LiNbO3 (XSAR)—feasibility study using macro model[J].Japanese Journal of Applied Physics, 2024, 63(2): 02SP44.

    [11] [11] TU C, ZHANG T, ZHANG Z, et al.Investigation on spurious mode suppression in 3.8-GHz SH-mode SAW resonators based on LiNbO3/SiO2/Si multilayer structure[J].Journal of Micromechanics and Microengineering, 2024,34(4):045007.

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    [14] [14] MORGAN D.Surface acoustic wave filters: With applications to electronic communications and signal processing[M].2th ed.Oxford:Academic Press, 2010.

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    WEN Fujun, WANG Yuanyuan, QIAN Lirong, WANG Litian, LI Cuiping, XIONG Yang, TIAN Yahui, LI Honglang. Design of Low Drift, Large Electromechanical Coupling SH-SAW Resonators[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 290

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    Paper Information

    Received: Mar. 25, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.002

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