Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 290(2024)

Design of Low Drift, Large Electromechanical Coupling SH-SAW Resonators

WEN Fujun1,2, WANG Yuanyuan1,2, QIAN Lirong1,2, WANG Litian1,2, LI Cuiping1,2, XIONG Yang1,2, TIAN Yahui3, and LI Honglang4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    Owing to its high electromechanical coupling coefficient (k2eff>30%), the horizontal shear (SH) acoustic modes in lithium niobate (LN) single-crystal films are typically investigated to develop thin-film acoustic resonators with large electromechanical coupling and ultra-wideband acoustic filters. However, its temperature coefficient of frequency (TCF) is extremely high (>-50×10-6/℃). A high TCF not only reduces the effective bandwidth but also limits the power-management capability of the filters. Herein, we present an investigation into the optimization design of a low drift, large electromechanical coupling horizontal-shear surface acoustic wave (SH-SAW) resonator based on the X-cut LN/SiO2/Si structure using a three-dimensional periodic finite-element model. Simulation results show that when the SH-SAW propagation angle ψ is between -10° and -20°, the film thicknesses of LN and SiO2 are 0.1λ and 0.2λ (where λ is the period of the interdigital transducer) respectively, the metallization rate of the aluminum electrode (η) is 0.4, the relative thickness of the electrode is between 5% and 10%, the k2eff of the SH-SAW resonator remains at ~30%, and the TCF is less than -20×10-6/℃. Hence, the resonator is suitable for developing the next generation of low-temperature drift, ultra-wideband 5G SAW filters.

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    WEN Fujun, WANG Yuanyuan, QIAN Lirong, WANG Litian, LI Cuiping, XIONG Yang, TIAN Yahui, LI Honglang. Design of Low Drift, Large Electromechanical Coupling SH-SAW Resonators[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 290

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    Paper Information

    Received: Mar. 25, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.002

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