Neural network modeling and prediction of HfO<sub><bold>2</bold></sub> thin film properties tuned by thermal annealing

Min Gao; Chaoyi Yin; Jianda Shao; Meiping Zhu

doi:10.1017/hpl.2024.6

High Power Laser Science and Engineering, Volume. 12, Issue 2, 02000e21(2024)

Neural network modeling and prediction of HfO₂ thin film properties tuned by thermal annealing

Min Gao^1,2, Chaoyi Yin², Jianda Shao^2,3,4, and Meiping Zhu^1,2,3,4、*

Author Affiliations

¹School of Microelectronics, Shanghai University, Shanghai, China

²Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China

³Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China

⁴Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, China

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Min Gao, Chaoyi Yin, Jianda Shao, Meiping Zhu. Neural network modeling and prediction of HfO₂ thin film properties tuned by thermal annealing[J]. High Power Laser Science and Engineering, 2024, 12(2): 02000e21

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Paper Information

Category: Research Articles

Received: Aug. 10, 2023

Accepted: Feb. 6, 2024

Published Online: May. 7, 2024

The Author Email: Meiping Zhu (bree@siom.ac.cn)

DOI:10.1017/hpl.2024.6

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology