Fig. 1. Thin film strain gauge structure

Fig. 2. Picture of strain gauge fabricated on C / SiC substrate

Fig. 3. Schematic diagram of cantilever beam principle

Fig. 4. XRD test results of three composite insulation layers after high temperature cycling

Fig. 5. SEM images of YSZ / Al₂O₃, Al₂O₃⁃YSZ / Al₂O₃ and HfO₂⁃YSZ / Al₂O₃ composite insulating layer films after 3 heating and cooling cycles

Fig. 6. EDS surface scanning element distribution map of HfO₂⁃YSZ / Al₂O₃ composite insulation layer film after 3 heating and cooling cycles

Fig. 7. Temperature⁃resistance curve of YSZ / Al₂O₃ insulation layer

Fig. 8. Temperature⁃resistance curve of Al₂O₃⁃YSZ / Al₂O₃ insulation layer

Fig. 9. Temperature⁃resistance curve of HfO₂⁃YSZ / Al₂O₃ insulation layer

Fig. 10. Strain⁃resistance curves of thin film strain gauges at different temperatures