Infrared and Laser Engineering, Volume. 50, Issue 11, 20200516(2021)

Synchronization trigger design of MOPA structure excimer laser

Chen Wang1,2, Xu Liang1, Ying Lin1, and Xiaodong Fang1,3
Author Affiliations
  • 1Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
  • 2University of Science and Technology of China, Hefei 230026, China
  • 3Shenzhen ShengFang Tech Co., Ltd., Shenzhen 518000, China
  • show less
    References(15)

    [1] Zhu Haohan, Wang Xiaochao, Huang Wenfa, et al. High precision time synchronization fiducial system of SG-II high-power laser driver[J]. Chinese Journal of Lasers, 46, 1101011(2019).

    [2] Dang Z, Yuan X D, Yuan X B, et al. The research of automatic control system of XG II laser facility[J]. Optics & Opto-electronic Technology, 2, 36-39(2004).

    [3] Qian X D, Li X R, Liang X, et al. Synchronous control for MOPA excimer laser systems[J]. Laser Technology, 39, 233-236(2015).

    [4] Dong L, Liu X Y, Chen H. Properties of pulse single-frequency laser and extra-cavity double frequency green laser[J]. Chinese Optics, 8, 800-805(2015).

    [5] Fujita E, Mashiko Y, Asaya S, et al. High power narrow-line-width linearly-polarized 1610 nm Er: Yb all-fiber MOPA[J]. Optics Express, 24, 26255(2016).

    [6] [6] Takahito Chibana, Hitoshi Nakano, Hideo Hata, et al. Development status of a 193 nm immersion exposure tool[C]Proc of SPIE, 2006, 6154: 61541V.

    [7] Liang X, Zhao D L, Lin Y, et al. High repetition rate and high accuracy capacitor charging pulse power supply based on controllable LC series resonance[J]. High Voltage Engineering, 44, 3022-3027(2018).

    [8] Qi L H, Ni Q L, Chen B. Experimental investigation of laser-produced-plasma EUV source based on liquid target[J]. Optics and Precision Engineering, 13, 604-607(2005).

    [9] Yu F, Li D H, Xue L. Electromagnetic compatibility design in optics and image processing equipment[J]. Optics and Precision Engineering, 100-106(2004).

    [10] Pan N, Liang X, Lin Y, et al. Transmission method of analog signal in excimer laser system[J]. Infrared and Laser Engineering, 48, 0905003(2019).

    [11] Liu R J, Ma C, Shi W, et al. Study on time jitter and trigger synchronization characteristics of ns pulsed laser diode[J]. Infrared and Laser Engineering, 49, 20200147(2020).

    [12] Wang X Y, Tang G F, Wei X G, et al. Discussion on isolation requirement of high voltage DC/DC converter for MMC-HVDC transmission system[J]. Automation of Electric Power Systems, 41, 172-178(2017).

    [13] Shi H Y, Zhao J S, Song X L, et al. Analysison factors affecting energy stability of excimer laser for lithography[J]. Infrared and Laser Engineering, 43, 3540-3546(2014).

    [14] Zhao D L, Li W J, Liang X, et al. Study on energy stability for excimer laser skin therapeutic apparatus[J]. Infrared and Laser Engineering, 46, 1206001(2017).

    [15] Wang Y, Ding K, Xu Y L. Optical fiber vibration sensing system using delay line method[J]. Microwave and Optical Technology Letters, 61, 853-857(2019).

    Tools

    Get Citation

    Copy Citation Text

    Chen Wang, Xu Liang, Ying Lin, Xiaodong Fang. Synchronization trigger design of MOPA structure excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20200516

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Lasers & Laser optics

    Received: Dec. 25, 2020

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email:

    DOI:10.3788/IRLA20200516

    Topics