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Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312014(2023)

Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology

Jiao Bai1, Jingwen Li2, Xiaohao Wang2, and Xinghui Li2,3、*
Author Affiliations
  • 1Institute of Materials, China Academy of Engineering Physics, Jiangyou 621908, Sichuan, China
  • 2Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong, China
  • 3Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, Guangdong, China
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    AbstractGet PDF(in Chinese)
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    References (115)
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    Diagram of chromatic confocal technology. (a) Basic principle; (b) response curve

    Fig. 1. Diagram of chromatic confocal technology. (a) Basic principle; (b) response curve

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    Turned and milled surface measurement by chromatic confocal sensor[21]

    Fig. 2. Turned and milled surface measurement by chromatic confocal sensor[21]

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    On-machine furface profile measurement by chromatic confocal technology. (a), (b), (c) Turned sphere surface[26]; (d), (e), (f) grinded free-form surface[27]

    Fig. 3. On-machine furface profile measurement by chromatic confocal technology. (a), (b), (c) Turned sphere surface[26]; (d), (e), (f) grinded free-form surface[27]

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    Micro structure measurement using chromatic confocal technology. (a) Microcolumn array[38]; (b) microgroove[40]; (c) MEMS structure[41]; (d) micro letter structure[44]

    Fig. 4. Micro structure measurement using chromatic confocal technology. (a) Microcolumn array[38]; (b) microgroove[40]; (c) MEMS structure[41]; (d) micro letter structure[44]

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    Biological tissues measurement using chromatic confocal sensors. (a) Onion slices[45]; (b) human cornea[46]; (c), (d) porcine oral mucosa[48]; (e) teeth profile[49]

    Fig. 5. Biological tissues measurement using chromatic confocal sensors. (a) Onion slices[45]; (b) human cornea[46]; (c), (d) porcine oral mucosa[48]; (e) teeth profile[49]

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    Workpiece thickness measurement using chromatic confocal sensor. (a) Step height measurement[50]; (b) symmetrical measurement[51]; (c) auxiliary membrane symmetry measurement[54]

    Fig. 6. Workpiece thickness measurement using chromatic confocal sensor. (a) Step height measurement[50]; (b) symmetrical measurement[51]; (c) auxiliary membrane symmetry measurement[54]

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    Film thickness measurement by chromatic confocal technology. (a), (b) Double-layer reflective method[58]; (c) constant incident-angle method[60]

    Fig. 7. Film thickness measurement by chromatic confocal technology. (a), (b) Double-layer reflective method[58]; (c) constant incident-angle method[60]

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    Light source of chromatic confocal system. (a) PCF device and its spectrum[63]; (b) MOF supercontinum light source and its spectrum[64]

    Fig. 8. Light source of chromatic confocal system. (a) PCF device and its spectrum[63]; (b) MOF supercontinum light source and its spectrum[64]

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    Dispersion objective of chromatic confocal system. (a), (b), (c) Lens group[72-73, 75]; (d) series lens[77]

    Fig. 9. Dispersion objective of chromatic confocal system. (a), (b), (c) Lens group[72-73, 75]; (d) series lens[77]

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    Dispersion objective based on DOE. (a) Dispersion characteristics of DOE[79]; (b) DOE physical object[87]; (c) chromatic confocal system with DOE[79]; (d), (e) DOE mixed with lens[85]; (f) DOE multipoint chromatic confocal system[84]

    Fig. 10. Dispersion objective based on DOE. (a) Dispersion characteristics of DOE[79]; (b) DOE physical object[87]; (c) chromatic confocal system with DOE[79]; (d), (e) DOE mixed with lens[85]; (f) DOE multipoint chromatic confocal system[84]

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    Chromatic confocal system with different confocal types. (a) Pinhole array[94]; (b) LCD pixel array[45]

    Fig. 11. Chromatic confocal system with different confocal types. (a) Pinhole array[94]; (b) LCD pixel array[45]

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    Chromatic confocal system with fiber. (a) Multimode fiber[97]; (b) fiber coupler[99]

    Fig. 12. Chromatic confocal system with fiber. (a) Multimode fiber[97]; (b) fiber coupler[99]

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    Detection methods of chromatic confocal system. (a) Transmissivity difference[103]; (b) CCD difference[104]

    Fig. 13. Detection methods of chromatic confocal system. (a) Transmissivity difference[103]; (b) CCD difference[104]

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    Normalization strategies of chromatic confocal system. Normalization strategies of (a), (b) light source spectrum[97]; (c), (d) reflected spectrum after removing dispersion objective[64]; (e), (f) pre-scaned self-reference spectrum[108]

    Fig. 14. Normalization strategies of chromatic confocal system. Normalization strategies of (a), (b) light source spectrum[97]; (c), (d) reflected spectrum after removing dispersion objective[64]; (e), (f) pre-scaned self-reference spectrum[108]

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    • Table 1. Performance parameters of several chromatic confocal sensor products

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      Table 1. Performance parameters of several chromatic confocal sensor products

      ProductStil（CL2-MG210）Precitec（CHRocodile C）Micro-Epsilon（IFS2402）ThinkFocus（OP2）LightE-Technology（D35A40R0S3）
      Measuring range /μm400500400380400
      Maximal slope angle /（°）±28±45±13±28±40
      Spot size /μm459103.4
      Axial resolution /nm1022016201
      Linearity error±55 nm170 nm±0.08 %±0.02 %—
      Diameter /mm274382735
      Measuring frequency /kHz2.04.06.54.54.0
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    Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li. Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312014

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 30, 2022

    Accepted: Oct. 27, 2022

    Published Online: Feb. 14, 2023

    The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.3788/LOP222679

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology