Chinese Optics Letters, Volume. 20, Issue 3, 031301(2022)
Quasi-resonant cavity enhanced photodetector with a subwavelength grating
Figures & Tables(11)
Fig. 1. (a) Schematic structure and (b) schematic layout of the QRCE-PD.
Fig. 2. Reflectivity of the FPC as a function of wavelength at normal incidence (black solid line) and as a function of incident angle at the 1550 nm wavelength (red dash dot line).
Fig. 3. (a) Electric field intensity distribution and (b) structure parameters of the SWG reflector.
Fig. 4. (a) Equivalent inclined-ridge cavity structure of the QRCE-PD and (b) schematic diagram of forming region 1 by multiple mutual mirroring.
Fig. 5. Equivalent multi-region F-P cavity structure of the QRCE-PD, which forms a multi-region RCE-PDs structure together with a built-in photodetector.
Fig. 6. (a) Normalized electric field intensity distribution and region distribution of the QRCE-PD. (b) Simulated spectral response of QRCE-PD, conventional RCE-PD, and p-i-n photodetector.
Fig. 7. Spectral response of QRCE-PD when tuning the refractive index of the cavity layer of the FPC.
Fig. 8. Frequency response of the embedded p-i-n photodiode at -3 V bias.
Table 1. Layer Structure of the Embedded p-i-n Photodiode
View tableView in ArticleTable 1. Layer Structure of the Embedded p-i-n Photodiode
Name Material Doping ( ) Thickness (nm) P layer InGaAsP 3 × 1018 300 Absorption layer InGaAs 1 × 1015 400 Spacing layer InGaAsP 2 × 1015 1500 N layer InP 3 × 1018 300
Table 2. Theoretical Parameters of Each Absorption Region
View tableView in ArticleTable 2. Theoretical Parameters of Each Absorption Region
Region Width (μm) 1 1.12 0.067 0.663 2 2.23 0.134 0.887 3 3.33 0.201 0.962 4 4.43 0.267 0.987 5 5.51 0.332 0.996 Total width 16.62 Total 0.950
Table 3. Performance Parameters of Different Long Wavelength Devices
View tableView in ArticleTable 3. Performance Parameters of Different Long Wavelength Devices
Parameter RCE[ 11 ]Taper cavity[ 5 ]Multi-cavities RCE[ 15 ]QRCE Absorber thickness (nm) 300 300 350 400 Linewidth (nm) Theoretical – – 0.5 0.12 Experimental 0.6 0.75 – Tuning range (nm) Theoretical – – – 28 Experimental – 10.2 – – Quantum efficiency Theoretical – – 80% 93.2% Experimental 59% 70% 70% –
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Gongqing Li, Xiaofeng Duan, Weifang Yuan, Yongqing Huang, Kai Liu, Xiaomin Ren, "Quasi-resonant cavity enhanced photodetector with a subwavelength grating," Chin. Opt. Lett. 20, 031301 (2022)
Paper Information
Category: Integrated Optics
Received: Nov. 10, 2021
Accepted: Dec. 2, 2021
Published Online: Jan. 11, 2022
The Author Email: Xiaofeng Duan (xfduan@bupt.edu.cn)
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