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Infrared and Laser Engineering, Volume. 54, Issue 5, 20250093(2025)

Attitude calibration method of micro nano grating based on laser interferometer

Wenzhe ZOU1,2, Yuqing GUAN1,2, Chuangwei GUO1,2, Yujie ZHANG1,2, Liqin LIU1,2, Ruishu XU1,2, Lihua LEI1,2, and Gang LING1,2、*
Author Affiliations
  • 1Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
  • 2Shanghai Key Laboratory of Online Test and Control Technology, Shanghai 201203, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
    Equations (12)
    References (18)
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    Figures & Tables(8)
    Schematic diagram of the grating displacement measurement system

    Fig. 1. Schematic diagram of the grating displacement measurement system

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    Schematic diagram of part of the optical path of the photodetector

    Fig. 2. Schematic diagram of part of the optical path of the photodetector

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    Schematic diagram of the assembly error attitude of the grating and the stage

    Fig. 3. Schematic diagram of the assembly error attitude of the grating and the stage

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    Schematic diagram of the uniaxial calibration process

    Fig. 4. Schematic diagram of the uniaxial calibration process

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    Physical diagram of the system

    Fig. 5. Physical diagram of the system

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    Schematic diagram of the calibration of the photoelectric autocollimator

    Fig. 6. Schematic diagram of the calibration of the photoelectric autocollimator

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    • Table 1. Measurement results before and after calibration

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      Table 1. Measurement results before and after calibration

      Test number12345
      Indication of the laser interferometer/μm499.9989499.9987499.9992499.9992499.9994
      Indication of the displacement measurement system(before calibration)/μm499.8687498.7625499.4384497.9730499.9608
      Indication of the displacement measurement system(after $ \theta Z $ calibration)/μm499.9898499.1781499.4759499.9926499.9701
      Indication of the displacement measurement system(after $ \theta Y $ calibration)/μm499.9976499.9972499.9977499.9976499.9978
      Indication of the displacement measurement system(after $ \theta X $ calibration)/μm499.9978499.9975499.9973499.9981499.9979
      Indication difference/μm0.00110.00120.00190.00110.0015

    • Table 2. Accumulated value of rotation angle

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      Table 2. Accumulated value of rotation angle

      Test serial number12345
      Accumulated rotation angle($ \theta Z $)/(°)1.262.34−0.695.520.33
      Accumulated rotation angle($ \theta Y $)/(°)0.32−3.282.620.28−0.61
      Accumulated rotation angle($ \theta X $)/(°)0.541.33−2.093.78−0.36
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    Wenzhe ZOU, Yuqing GUAN, Chuangwei GUO, Yujie ZHANG, Liqin LIU, Ruishu XU, Lihua LEI, Gang LING. Attitude calibration method of micro nano grating based on laser interferometer[J]. Infrared and Laser Engineering, 2025, 54(5): 20250093

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    Paper Information

    Category: 光电测量

    Received: Feb. 11, 2025

    Accepted: --

    Published Online: May. 26, 2025

    The Author Email:

    DOI:10.3788/IRLA20250093

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology