Laser & Infrared, Volume. 55, Issue 1, 102(2025)
Optical system analysis and heat dissipation design of high-power laser direct writing equipment
[1] [1] Huang L, Hong Z, Chen Q D, et al. Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing[J]. Light: Advanced Manufacturing, 2024, 4(4): 543-569.
[2] [2] Gonzalez-Hernandez D, Varapnickas S, Bertoncini A, et al. Micro-optics 3D printed via multi-photon laser lithography[J]. Advanced Optical Materials, 2023, 11(1): 2201701.
[5] [5] Zuo J, Lin X. High-power laser systems[J]. Laser Photonics Rev, 2022, 16(5): 2100741.
[8] [8] Chung H, Zhang F, Li H, et al. Inverse design of high-NA metalens for maskless lithography[J]. Nanophotonics, 2023, 12(13): 2371-2381.
[9] [9] Hornbeck L J. Digital Light Processing for high-brightness, high-resolution applications[J]. Proc. of SPIE, 1997, 3013: 27-40.
[16] [16] Syu Y S, Huang Y B, Jiang M Z, et al. Maskless lithography for large area patterning of three-dimensional microstructures with application on a light guiding plate[J]. Opt. Express, 2023, 31(8): 12232-12248.
[17] [17] Yang Z, Lin J, Liu L, et al. Genetic algorithm-based optical proximity correction for DMD maskless lithography[J]. Opt. Express, 2023, 31(14): 23598-23607.
Get Citation
Copy Citation Text
HU Xing-tao, TIAN Lei-lei, TONG Bao-hong, MIAO Si-zhong, ZHOU Shuo, LI Fan, CHEN Kun, WANG Ru. Optical system analysis and heat dissipation design of high-power laser direct writing equipment[J]. Laser & Infrared, 2025, 55(1): 102
Category:
Received: Sep. 2, 2024
Accepted: Mar. 13, 2025
Published Online: Mar. 13, 2025
The Author Email: CHEN Kun (535630207@qq.com)