Fig. 1. EUV detection diagram

Fig. 2. Reflectance of planar multilayer mirrors for different polarized light at different incidence angles

Fig. 3. EUV spectral curves formed under different laser power densities

Fig. 4. Spectral energy distributions on detector obtained by systems with 1-3 multilayer mirrors when light source signal with power density of 1.00×10¹¹ W/cm² is illuminated

Fig. 5. Spectral response curve of SXUV100 photodiode ^[23]

Fig. 6. Performance of pulse signals measured by SXUV100 photodiode. (a) Single pulse energy and signal pulse width detected by SXUV100 photodiode versus input single pulse energy of 532 nm light source ; (b) response time of detection signal of SXUV100 photodiode versus input single pulse energy of 532 nm light source

Fig. 7. System design and setup. (a) System structure diagram; (b) physical drawing of EUV radiation detection system

Fig. 8. Calibration of EUV radiation detection system using metrology beamline at Hefei National Synchrotron Radiation Laboratory

Fig. 9. Spectral response curve of EUV radiation detector system

Fig. 10. Transmittance curve of Zr filter film

Fig. 11. Calibration curve of complete system and theoretical curve calculated from nominal parameters of each component

Fig. 12. Spectral energy distribution detected by detector