Acta Photonica Sinica, Volume. 52, Issue 10, 1052419(2023)
Femtosecond Laser Processing Micro-cantilever Thin-film Fiber Optic Acoustic Sensor
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Yiwen ZHENG, Yongzhang CHEN, Qianhao TANG, Yixin ZHU, Yongqin YU, Chenlin DU, Shuangchen RUAN. Femtosecond Laser Processing Micro-cantilever Thin-film Fiber Optic Acoustic Sensor[J]. Acta Photonica Sinica, 2023, 52(10): 1052419
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Received: May. 31, 2023
Accepted: Aug. 4, 2023
Published Online: Dec. 5, 2023
The Author Email: Yongqin YU (yuyongqin@sztu.edu.cn)