Acta Physica Sinica, Volume. 68, Issue 19, 195204-1(2019)

Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field

Sui-Han Cui1... Zhong-Zhen Wu1,2,*, Shu Xiao1, Lei Chen1, Ti-Jun Li1, Liang-Liang Liu1, K Y Fu Ricky2, Xiu-Bo Tian1, K Chu Paul2 and Wen-Chang Tan1 |Show fewer author(s)
Author Affiliations
  • 1School of Advanced Materials, Peking University Shenzhen Graduate School, Shenzhen 518055, China
  • 2Department of Physics and Materials Science, City University of Hong Kong, Hong Kong 999077, China
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    References(37)

    [12] Helmersson U[J]. Proceedings of 11th International Workshop on Plasma Based Ion Implantation and Deposition Harbin, 21(2011).

    [15] Duan W Z[J]. M. S. Thesis(2010).

    [33] Gong W Y[J]. M. S. Thesis(2009).

    [36] Guan K Z, Li Y Q[J]. Vaccum, 23, 37(1986).

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    Sui-Han Cui, Zhong-Zhen Wu, Shu Xiao, Lei Chen, Ti-Jun Li, Liang-Liang Liu, K Y Fu Ricky, Xiu-Bo Tian, K Chu Paul, Wen-Chang Tan. Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field[J]. Acta Physica Sinica, 2019, 68(19): 195204-1

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    Paper Information

    Received: Apr. 22, 2019

    Accepted: --

    Published Online: Sep. 16, 2020

    The Author Email:

    DOI:10.7498/aps.68.20190583

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