Acta Physica Sinica, Volume. 68, Issue 19, 195204-1(2019)
[10] Holtzer N, Antonin O, Minea T, Marnieros S, Bouchier D[J]. Surf. Coat. Technol., 250, 32(2014).
[12] Helmersson U[J]. Proceedings of 11th International Workshop on Plasma Based Ion Implantation and Deposition Harbin, 21(2011).
[15] Duan W Z[J]. M. S. Thesis(2010).
[33] Gong W Y[J]. M. S. Thesis(2009).
[36] Guan K Z, Li Y Q[J]. Vaccum, 23, 37(1986).
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Sui-Han Cui, Zhong-Zhen Wu, Shu Xiao, Lei Chen, Ti-Jun Li, Liang-Liang Liu, K Y Fu Ricky, Xiu-Bo Tian, K Chu Paul, Wen-Chang Tan.
Received: Apr. 22, 2019
Accepted: --
Published Online: Sep. 16, 2020
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