Piezoelectrics & Acoustooptics, Volume. 45, Issue 2, 288(2023)

Fabrication of High-Frequency PIN-PMN-PT 1-3 Piezoelectric Composite Transducers Based on Ultrafast Laser

LIU Youjian, LEI Zhihong, WU Junwei, CHEN Yan, and JI Xuanrong
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    References(12)

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    [5] [5] ZHOU Wei,ZHANG Tao,OU-YANG Jun,et al.PIN-PMN-PT single crystal 1-3 composite-based 20 MHz ultrasound phased array[J].Micromachines,2020,11(5):524.

    [7] [7] LI Xiang,MA Teng,TIAN Jian,et al.Micromachined PIN-PMN-PT crystal composite transducer for high-frequency intravascular ultrasound(IVUS) imaging[J].IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2014,61(7):1171-1178.

    [8] [8] LI Xiaobing,TIAN Junting,YAN Dingwei,et al.Soft mold process for 1-3 piezocomposite and its applicat-ion in high frequency medical ultrasound imaging[C]//Xi’an,China:IEEE Ultrasonics Symposium,IEEE,2021:1-4.

    [9] [9] WANG Jushan,CHEN Mingzhu,ZHAO Xiangyong,et al.Fabrication and high acoustic performance of high frequency needle ultrasound transducer with PMN-PT/-epoxy 1-3 piezoelectric composite prepared by diceand fill method[J].Sensors and Actuators A:Physical,2021,318:112528.

    [12] [12] PIREDDA G,STROJ S,ZISS D,et al.Micro-machining of PMN-PT crystals with ultrashort laser pulses[J].Applied Physics A,2019,125(3):201.

    [13] [13] CHEN J,LAM K H,DAI J Y,et al.35 MHz PMN-PT single crystal annular array ultrasonic transducer[J].Integrated Ferroelectrics,2012,139(1):116-122.

    [14] [14] XU Jie,HAN Zhile,WANG Ninghao,et al.Micromachined high frequency 1-3 piezocomposite transducer using picosecond laser[J].IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2021,68(6):2219-2226.

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    LIU Youjian, LEI Zhihong, WU Junwei, CHEN Yan, JI Xuanrong. Fabrication of High-Frequency PIN-PMN-PT 1-3 Piezoelectric Composite Transducers Based on Ultrafast Laser[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 288

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    Paper Information

    Received: Nov. 8, 2022

    Accepted: --

    Published Online: Nov. 29, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.02.023

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