Laser & Optoelectronics Progress, Volume. 59, Issue 1, 0114005(2022)

Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning

Xin Li1,2, Tong Zhang1,2, Lingfei Ji1,2、*, and Litian Zhang1,2
Author Affiliations
  • 1Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
  • 2Key Laboratory of Trans-Scale laser Manufacturing Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China
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    References(22)

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    [12] Lü X Z, Ji L F, Wu Y et al. Fabrication of high performance anti-reflection silicon surface by picosecond laser scanning irradiation with chemical corrosion[J]. Chinese Journal of Lasers, 42, 0403006(2015).

    [19] Gao L Y, Zhou J Z, Sun Q et al. Numerical simulation and surface morphology of laser-cleaned aluminum alloy paint layer[J]. Chinese Journal of Lasers, 46, 0502002(2019).

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    Xin Li, Tong Zhang, Lingfei Ji, Litian Zhang. Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0114005

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Mar. 19, 2021

    Accepted: Apr. 21, 2021

    Published Online: Dec. 23, 2021

    The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)

    DOI:10.3788/LOP202259.0114005

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