Laser & Optoelectronics Progress, Volume. 59, Issue 1, 0114005(2022)
Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning
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Xin Li, Tong Zhang, Lingfei Ji, Litian Zhang. Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0114005
Category: Lasers and Laser Optics
Received: Mar. 19, 2021
Accepted: Apr. 21, 2021
Published Online: Dec. 23, 2021
The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)