Fig. 1. The schematic diagram of terahertz circuit design process, (a)conventional design method, (b) closed loop design method

Fig. 2. Flow chart of GaAs thin integrated circuit manufacturing process (a) frontal process, (b) temporary slide, (c) remove substrate, (d) metal suspension, (e) remove slide

Fig. 3. The schematic diagram of reverse parallel Schottky diode mixing circuit

Fig. 4. The circuit diagram of 1030 GHz sub-harmonic mixer

Fig. 5. Simulated results of each part of 1 030 GHz mixer

Fig. 6. The schematic diagram of reverse parallel Schottky diode tripler circuit

Fig. 7. The circuit diagram of 750~1 100 GHz tripler

Fig. 8. Simulated results of each part of 750~1 100 GHz tripler

Fig. 9. Test platform of 1 030 GHz sub-harmonic mixer

Fig. 10. Measured results of monolithic circuit based on thin film technology (a) measured conversion loss of 1 030 GHz sub-harmonic mixer, (b) measured output power of 750~1 100 GHz tripler