Fig. 1. Structure of LNOI

Fig. 2. Schematic diagram of ring resonator

Fig. 3. Output spectrum of ring resonator

Fig. 4. Structure of pressure sensor. (a) Without pressure; (b) under pressure

Fig. 5. Movement of the resonant peak. (a) Low Q factor; (b) high Q factor

Fig. 6. Schematic diagram of cantilever beam

Fig. 7. Cantilever beam under pressure

Fig. 8. Displacement of each section of cantilever beam

Fig. 9. Relationship between error and pressure

Fig. 10. Resonant peak line when critical coupling and non-critical coupling

Fig. 11. Resonant peak line with different losses

Fig. 12. Relationship between Q factor and loss

Fig. 13. Relationship between Q factor and the radius of ring waveguide

Fig. 14. Racetrack ring resonator

Fig. 15. Mode field distribution of TE mode in waveguide