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Acta Optica Sinica, Volume. 33, Issue 4, 430005(2013)

Influence of Methane Volume Fraction on the Radical Distribution in MPCVD Plasma

Li Guowei*, Cao Wei, Wu Jianpeng, Tao Liping, and Ma Zhibin
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    Article index updated: Mar. 10, 2025

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    Li Guowei, Cao Wei, Wu Jianpeng, Tao Liping, Ma Zhibin. Influence of Methane Volume Fraction on the Radical Distribution in MPCVD Plasma[J]. Acta Optica Sinica, 2013, 33(4): 430005

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    Paper Information

    Category: Spectroscopy

    Received: Nov. 21, 2012

    Accepted: --

    Published Online: Mar. 5, 2013

    The Author Email: Guowei Li (meishanliguowei@163.com)

    DOI:10.3788/aos201333.0430005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology