Infrared and Laser Engineering, Volume. 44, Issue 9, 2774(2015)
Influences of temperature on the transport properties of electrochemical etching for silicon microchannel
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Liu Xinnan, Duanmu Qingduo, Wang Guozheng, Sun Hongtao. Influences of temperature on the transport properties of electrochemical etching for silicon microchannel[J]. Infrared and Laser Engineering, 2015, 44(9): 2774
Paper Information
Category: 光电器件与材料
Received: Jan. 13, 2015
Accepted: Feb. 18, 2015
Published Online: Jan. 26, 2016
The Author Email: Xinnan Liu (liuxinnan1989@126.com)
CSTR:32186.14.
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