[1] [1] Serecunova S, Seyringer D, Uherek F, et al. Comparison of optical properties of 1×128 splitters based on Y-branch and MMI approaches[J]. In Optical Components and Materials XVIII, 2021, 11682: 230-237.

[2] [2] Li Junhui, Yao Hao, Deng Jiayao, et al. Electro-optic Tunable Grating-assisted Optical Waveguide Directional Coupler in Lithium Niobate on Insulator[J]. Acta Photonica Sinica, 2023, 52(10): 1052417.

[3] [3] Li Mengyuan, Rao Lan, He Xiaoyang, et al. Low-Loss, broadband MMI coupler based on thin film lithium niobate platform[J]. Physcia Scripta, 2023, 98(3): 035506.

[6] [6] Minz M, Sonkar R K. Design of a grating-assisted silicon hybrid mode -, polarization -, and wavelength - division (De) multiplexer for on-chip optical interconnects[J]. Applied Optics, 2022, 61(11): 3096-3100.

[7] [7] Malka D, Ran M. 1× 8 green light intensity splitter based on gallium-nitride slot waveguide in MMI structure[C]//Optical Design and Engineering VII. SPIE, 2018, 10690: 221-227.

[8] [8] Malka D, Danan Y, Ramon Y, et al. A photonic 1× 4 power splitter based on multimode interference in silicongallium-nitride slot waveguide structures[J]. Materials, 2016, 9(7): 516.

[9] [9] Samoi E, Benezra Y, Malka D. An ultracompact 3× 1 MMI power-combiner based on Si slot-waveguide structures[J]. Photonics and Nanostructures-Fundamentals and Applications, 2020, 39: 100780.

[12] [12] Frishman, Aviv, and Dror Malka. An optical 1× 4 power splitter based on Silicon-Nitride MMI using strip waveguide structures[J]. Nanomaterials, 2023, 13(14): 2077.

[13] [13] Patsamanis G, Ketzaki D, Chatzitheocharis D, et al. Silicon nitride asymmetric 1× 2 power splitter based on multimode interference[C]//Integrated Optics: Devices, Materials, and Technologies XXV. SPIE, 2021, 11689: 236-241.

[14] [14] Soldano L B, Pennings E C M. Optical multi-mode interference devices based on self-imaging: principles and applications[J]. Journal of lightwave technology, 1995, 13(4): 615-627

[15] [15] Chen Y, Yu J, et al. Design of an ultra-compact 3 dB MMI coupler[J]. Optoelectronics Letters, 2009, 5: 427-429.

[16] [16] Desai S, Yang G, Li L, et al. Ultra - compact and Low Crosstalk 1xN Multimode Interference Splitter on Silicon-on-insulator[C]//Proceedings of the 14th Pacific Rim Conference on Lasers and Electro-optics (CLEO PR 2020). Sydney, Australia: IEEE, 2020: C11H-3.

[17] [17] Li Z Y, Fan Z W, et al. Research and Design of 1×4 Multimode Interference Coupler with High Uniformity[J]. Study on Optical Communications, 2023(3): 53-59.

[18] [18] Song W W, Gatdula R, Abbaslou S, et al. High-density Waveguide Superlattices with Low Crosstalk[J]. Nature communications, 2015, 6: 8027.