[1] Takeda M, Ina H, Kobayashi S. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J]. Journal of the Optical Society of America, 72, 156-160(1982).

[2] Servin M, Estrada J C, Quiroga J A et al. Noise in phase shifting interferometry[J]. Optics Express, 17, 8789-8794(2009).

[3] Gao P, Yao B L, Lindlein N et al. Phase-shift extraction for generalized phase-shifting interferometry[J]. Optics Letters, 34, 3553-3555(2009).

[4] Sun H, Han S, Tang S H et al. Misalignment analysis of cylindrical inner surfaces in interferometric measurement[J]. Acta Optica Sinica, 37, 0112005(2017).

[5] Zhao K Q, Xie F, Ma S et al. Research on a wavenumber resolved low coherence interferometry for step height measurement[J]. Acta Optica Sinica, 35, 1112006(2015).

[6] Qin Y W. Thickness measurement of lubricant film by optical coherence tomography[J]. Optics and Precision Engineering, 25, 1142-1148(2017).

[7] Dong L, Wang B, Liu X Y. Interferometric detection technique based on optical coherence and weak signal detection[J]. Acta Optica Sinica, 37, 0212001(2017).

[8] Liu J Y, Lei F. Measurement of lens-center thickness based on low-coherence interference with transmitted illumination[J]. Laser & Optoelectronics Progress, 56, 121201(2019).

[9] Zhang Z L, Su J H. Simulation and reconstruction of 3D microscopic morphology of damaged optical film surface[J]. Acta Optica Sinica, 41, 0212002(2021).

[10] Lü S H, Ding H C, Xiang Y et al. Surface welding defect detection based on Michelson interferometer[J]. Laser & Optoelectronics Progress, 58, 1912005(2021).

[11] Park M C, Kim S W. Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms[J]. Optical Engineering, 39, 952-959(2000).

[12] Pikálek T, FoArˇt T, Buchta Z. Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy[J]. Applied Optics, 53, 8463-8470(2014).

[13] Harasaki A, Schmit J, Wyant J C. Improved vertical-scanning interferometry[J]. Applied Optics, 39, 2107-2115(2000).

[14] Guo T, Yuan L, Tang D W et al. Analysis of the synchronous phase-shifting method in a white-light spectral interferometer[J]. Applied Optics, 59, 2983-2991(2020).

[15] Li J, Tian A L, Wang D S et al. Arandom two-step phase shift algorithm based on polynomial fitting background light[J]. Laser & Optoelectronics Progress, 58, 1112008(2021).

[16] de Groot P, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J]. Journal of Modern Optics, 42, 389-401(1995).

[17] de Groot P, de Lega X C, Kramer J et al. Determination of fringe order in white-light interference microscopy[J]. Applied Optics, 41, 4571-4578(2002).

[18] Sinclair M B, de Boer M P, Corwin A D. Long-working-distance incoherent-light interference microscope[J]. Applied Optics, 44, 7714-7721(2005).

[19] Luo S J, Sasaki O, Liu Y X et al. Elimination of dispersion effect in a white-light scanning interferometer by using a spectral analyzer[J]. Optical Review, 24, 27-32(2017).

[20] Luo S J, Suzuki T, Sasaki O et al. Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement[J]. Applied Optics, 58, 3548-3554(2019).