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Advanced Photonics Nexus, Volume. 3, Issue 6, 066005(2024)

Hybrid silicon-barium-titanate tunable racetrack resonators based on chemical solution deposition

Lei Zhang1... Xin Wang1, Yong Zhang1,2,*, Jian Shen1, Chenglong Feng1, Jian Xu3, Min Liu3, Wei Wang4, Yongqiang Deng5, Yang Xu5, Yi Li5, Guofeng Yin6 and Yikai Su1 |Show fewer author(s)
Author Affiliations
  • 1Shanghai Jiao Tong University, State Key Lab of Advanced Optical Communication Systems and Networks, Department of Electron Engineering, Shanghai, China
  • 2East China Normal University, State Key Laboratory of Precision Spectroscopy, Shanghai, China
  • 3Shanghai Jiao Tong University, Center for Advanced Electronic Materials and Devices, Shanghai, China
  • 4Shanghai Industrial μTechnology Research Institute, Shanghai, China
  • 5Beijing R&D Institute, VanJee Technology, Beijing, China
  • 6Wuhan Enlarging Photonics Technology Co. Ltd., Wuhan, China
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    [1] G. Wetzstein et al. Inference in artificial intelligence with deep optics and photonics. Nature, 588, 39-47(2020).

    [2] X. Zheng et al. Heterogeneously integrated, superconducting silicon-photonic platform for measurement-device-independent quantum key distribution. Adv. Photonics, 3, 055002(2021).

    [3] Y. Zhang et al. Ultra-broadband mode size converter using on-chip metamaterial-based Luneburg lens. ACS Photonics, 8, 202-208(2020).

    [4] Y. He et al. Silicon high-order mode (de)multiplexer on single polarization. J. Lightwave Technol., 36, 5746-5753(2018).

    [5] Y. Zhang et al. High-speed electro-optic modulation in topological interface states of a one-dimensional lattice. Light Sci. Appl., 12, 206(2023).

    [6] P. Kharel et al. Breaking voltage–bandwidth limits in integrated lithium niobate modulators using micro-structured electrodes. Optica, 8, 357(2021).

    [7] Y. Yao et al. Performance of integrated optical switches based on 2D materials and beyond. Front Optoelectron., 13, 129-138(2020).

    [8] Y. Zhang et al. Architecture and devices for silicon photonic switching in wavelength, polarization and mode. J. Lightwave Technol., 38, 215-225(2020).

    [9] Y. Su et al. Silicon photonic platform for passive waveguide devices: materials, fabrication, and applications. Adv. Mater. Technol., 5, 1901153(2020).

    [10] D. Liang et al. Recent progress in heterogeneous III-V-on-silicon photonic integration. Light Adv. Manuf., 2, 59(2021).

    [11] J. E. Ortmann et al. Ultra-low-power tuning in hybrid barium titanate–silicon nitride electro-optic devices on silicon. ACS Photonics, 6, 2677-2684(2019).

    [12] C. Wang et al. Nanophotonic lithium niobate electro-optic modulators. Opt. Express, 26, 1547-1555(2018).

    [13] X. Yan et al. High optical damage threshold on-chip lithium tantalate microdesk resonator. Opt. Lett., 45, 4100-4103(2020).

    [14] K. Alexander et al. Nanophotonic Pockels modulators on a silicon nitride platform. Nat. Commun., 9, 3444(2018).

    [15] W. Guo et al. Epitaxial integration of BaTiO3 on Si for electro-optic applications. J. Vac. Sci. Technol., 39, 030804(2021). https://doi.org/JVSTAL0022-535510.1116/6.0000923

    [16] B. I. Edmondson et al. Epitaxial, electro-optically active barium titanate thin films on silicon by chemical solution deposition. J. Am. Ceram. Soc., 103, 1209-1218(2019).

    [17] R. A. McKee et al. Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon. Appl. Phys. Lett., 59, 782-784(1991).

    [18] M. B. Lee et al. Heteroepitaxial growth of BaTiO3 films on Si by pulsed laser deposition. Appl. Phys. Lett., 66, 1331-1333(1995). https://doi.org/10.1063/1.113232

    [19] C. H. Jung et al. Reproducible resistance switching for BaTiO3 thin films fabricated by RF-magnetron sputtering. Thin Solid Films, 10, 3291-3294(2011). https://doi.org/10.1016/j.tsf.2010.12.149

    [20] P. Capper et al. Expitaxial crystal growth: methods and materials, 1, 1(2017).

    [21] E. Picavet et al. Integration of solution‐processed BaTiO3 thin films with high Pockels coefficient on photonic platforms. Adv. Funct. Mater., 34, 2403024(2024). https://doi.org/10.1002/adfm.202403024

    [22] M. Burla et al. 500 GHz plasmonic Mach–Zehnder modulator enabling sub-Thz microwave photonics. APL Photonics, 4, 056106(2019).

    [23] I. Taghavi et al. Polymer modulators in silicon photonics: review and projections. Nanophotonics, 11, 3855-3870(2022).

    [24] C. Xiong et al. Active silicon integrated nanophotonic: ferroelectric BaTiO3 devices. Nano Lett., 14, 1419-1425(2014). https://doi.org/10.1021/nl404513p

    [25] A. Messner et al. Plasmonic ferroelectric modulators. J. Lightwave Technol., 37, 281-290(2019).

    [26] S. Hashimoto et al. Effects of final annealing in oxygen on characteristics of BaTiO3 thin films for resistance random access memory. Jpn. J. Appl. Phys., 54, 10NA12(2015). https://doi.org/10.7567/JJAP.54.10NA12

    [27] V. R. Chinchamalatpure et al. Synthesis and electrical characterization of BaTiO3 thin films on Si(100). Mater. Sci. Appl., 1, 187-190(2010). https://doi.org/10.4236/msa.2010.14029

    [28] P. Rabiei et al. Polymer micro-ring filters and modulators. J. Lightwave Technol., 20, 1968-1975(2002).

    [29] A. Griffith et al. High quality factor and high confinement silicon resonators using etchless process. Opt. Express, 20, 21341-21345(2012).

    [30] S. Abel et al. A strong electro-optically active lead-free ferroelectric integrated on silicon. Nat. Commun., 4, 1671(2013).

    [31] J. Shen et al. Ultralow‐power piezo‐optomechanically tuning on CMOS‐compatible integrated silicon‐hafnium‐oxide platform. Laser Photonics Rev., 17, 2200248(2022).

    [32] H. Tian et al. Hybrid integrated photonics using bulk acoustic resonators. Nat. Commun., 11, 3073(2020).

    [33] P. Dong et al. Thermally tunable silicon racetrack resonators with ultralow tuning power. Opt. Express, 18, 20298-20299(2010).

    [34] E. Timurdogan et al. An ultralow power athermal silicon modulator. Nat Commun., 5, 4008(2014).

    [35] B. I. Edmondson et al. Epitaxial, electro-optically active barium titanate thin films on silicon by chemical solution deposition. J. Am. Ceram. Soc., 2, 1209-1218(2020).

    [36] P. Dong et al. High-speed and compact silicon modulator based on a racetrack resonator with a 1 V drive voltage. Opt. Lett., 35, 3246-3248(2010).

    [37] P. O. Wei et al. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Opt. Express, 26, 23728-23739(2018).

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    Lei Zhang, Xin Wang, Yong Zhang, Jian Shen, Chenglong Feng, Jian Xu, Min Liu, Wei Wang, Yongqiang Deng, Yang Xu, Yi Li, Guofeng Yin, Yikai Su, "Hybrid silicon-barium-titanate tunable racetrack resonators based on chemical solution deposition," Adv. Photon. Nexus 3, 066005 (2024)

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    Paper Information

    Received: Jun. 7, 2024

    Accepted: Sep. 24, 2024

    Published Online: Oct. 23, 2024

    The Author Email: Zhang Yong (yongzhang@sjtu.edu.cn)

    DOI:10.1117/1.APN.3.6.066005

    CSTR:32397.14.1.APN.3.6.066005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology