Acta Photonica Sinica, Volume. 53, Issue 8, 0823003(2024)

Design and Fabrication of O-band Silicon-based Silicon Dioxide Dense Wavelength-division Multiplexing AWG

Feng HAN1, Jiashun ZHANG2, Liangliang WANG2, Pengwei CUI2, Yue WANG2, Junming AN2,3、*, Jun CHEN4, Bingli SUN4, and Tianhong ZHOU4
Author Affiliations
  • 1School of Physics and Electronic Information Engineering, Jining Normal University, Ulanqab012000, China
  • 2Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 3College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Key Laboratory of Optoelectronic Circuit and Integration, Henan Shijia Photons Technology Co., Ltd., Hebi 458030, China
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    Figures & Tables(10)
    Schematics of AWG chip
    SEM profile and chip photo of silicon based silica AWG chip waveguide
    Packaged thermally insensitive O-band DWDM AWG module
    O-band output response spectra
    Optical performance of O-band DWDM AWG
    O-band AWG transmission spectra without temperature control
    O-band AWG transmission spectra with temperature control
    O-band AWG NRZ test eye pattern
    O-band AWG PAM-4 test eye pattern
    • Table 1. Design parameters of O-band 48 channel DWDM AWG chip

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      Table 1. Design parameters of O-band 48 channel DWDM AWG chip

      ParameterValue
      Center wavelength λ0/nm1 300.00
      Number of output channels48
      Channel spacing Δλ/nm0.676
      Effective refractive index of planar waveguides ns1.456 449
      Effective refractive index of arrayed waveguides nc1.454 442
      Group index of refraction ng1.474 753
      Output waveguide spacing Δxo/μm26.00
      Array waveguide spacing d/μm8.00
      Lauret circle focal length R/μm14 256.97
      Length difference of adjacent array waveguides ΔL/μm27.708
      Diffraction order m31
      Number of array waveguides N401
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    Feng HAN, Jiashun ZHANG, Liangliang WANG, Pengwei CUI, Yue WANG, Junming AN, Jun CHEN, Bingli SUN, Tianhong ZHOU. Design and Fabrication of O-band Silicon-based Silicon Dioxide Dense Wavelength-division Multiplexing AWG[J]. Acta Photonica Sinica, 2024, 53(8): 0823003

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    Paper Information

    Category: Optical Device

    Received: Dec. 28, 2023

    Accepted: Feb. 19, 2024

    Published Online: Oct. 15, 2024

    The Author Email: Junming AN (junming@semi.ac.cn)

    DOI:10.3788/gzxb20245308.0823003

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