[1] [1] POSPISCHIL A,HUMER M,FURCHI M M,et al.CMOS-compatible graphene photodetector covering all optical communication bands［J］.Nature Photonics,2013,7(11):892-896.

[2] [2] SCHIFFRIN A,PAASCH-COLBERG T,KARPOWICZ N,et al.Optical-field-induced current in dielectrics［J］.Nature,2013,493(7492):386-387.

[3] [3] AGCAYAZI T,CHATTERJEE K,BOZKURT A,et al.Flexible interconnects for electronic textiles［J］.Advanced Materials Technologies,2018,3(10):1700277-1700310

[4] [4] SUN Chen,WADE M T,LEE Y,et al.Single-chip microprocessor that communicates directly using light［J］.Nature,2015,528(7583):534-538.

[5] [5] YANG Wei,MAO Jiubing,FENG Xiaojuan.Research status and developing tread for waveguide-based board-Level optical interconnects technology［J］.Laser & Optoelectronics Progress,2016,53(6):060004.

[6] [6] LI G,BAI N,ZHAO N,et al.Space-division multiplexing:the next frontier in optical communication［J］.Advances in Optics and Photonics,2014,6(4):413-487.

[7] [7] TAN Dezhi,WANG Zhuo,XU Beibei,et al.Photonic circuits written by femtosecond laser in glass:improved fabrication and recent progress in photonic devices［J］.Advanced Photonics,2021,3(2):19-41.

[8] [8] FLAMINI F,SPAGNOLO N,SCIARRINO F.Photonic quantum information processing:A review［J］.Reports on Progress in Physics,2019,82(1):016001-016033.

[9] [9] MARPAUNG D,YAO Jianping,CAPMANY J.Integrated microwave photonics［J］.Nature Photonics,2019,13(2):80-90.

[10] [10] RAHIM A,RYCKEBOER E,SUBRAMANIAN A Z,et al.Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits［J］.Journal of Lightwave Technology,2017,35(4):639-649.

[11] [11] POBERAJ G,HU Hui,SOHLER W,et al.Lithium niobate on insulator(LNOI) for micro-photonic devices［J］.Laser & Photonics Reviews,2012,6(4):488-503.

[12] [12] SONG Zijin,YANG Dengcai,XIANG Meihua,et al.A non-uniform grating coupler with high coupling efficiency on LNOI［C］//USA:Proc SPIE,2022,12169:121698Q (8).

[13] [13] KANG Shuting,ZHANG Ru,HAO Zhenzhong,et al.High-efficiency chirped grating couplers on lithium niobate on insulator［J］.2021 Conference on Lasers and Electro-Optics (CLEO),2021,2:6651-6654.

[14] [14] CHENG Lirong,MAO Simei,LI Zhi,et al.Grating couplers on silicon photonics:Design principles,emerging trends and practical Issues［J］.Micromachines,2020,11(7):666-691.

[15] [15] MU Xin,WU Sailong,CHENG Lirong,et al.Edge couplers in silicon photonic integrated circuits:A review［J］.Applied Sciences-Basel,2020,10(4):1538-1567.

[16] [16] MOERMAN I,VAN DAELE P P,DEMEESTER P M.A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices［J］.IEEE Journal of Selected Topics in Quantum Electronics,1997,3(6):1308-1320.

[17] [17] LI Y P,YU J Z,CHEN S W.Rearrangeable nonblocking SOI waveguide thermooptic 4×4 switch matrix with low insertion loss and fast response［J］.IEEE Photonics Technology Letters,2005,17(8):1641-1643.

[18] [18] MCNAB S J,MOLL N,VLASOV Y A.Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides［J］.Optics Express,2003,11(22):2927-2939.

[19] [19] LIU Yan,YU Jinzhong.Low-loss coupler between fiber and waveguide based on silicon-on-insulator slot waveguides［J］.Applied Optics,2007,46(32):7858-7861.

[20] [20] LU Z L,PRATHER D W.Total internal reflection-evanescent coupler for fiber-to-waveguide integration of planar optoelectric devices ［J］.Optics Letters,2004,29(15):1748-1750.

[21] [21] HARRISON G R.The production of diffraction gratings: II.The design of echelle gratings and spectrographs［J］.Journal of the Optical Society of America,1949,39(7):522-528.

[23] [23] FENG Junbo,ZHOU Zhiping.Polarization beam splitter using a binary blazed grating coupler［J］.Optics Letters,2007,32(12):1662-1664.

[24] [24] EGGLETON B J,KERBAGE C,WESTBROOK P S,et al.Microstructured optical fiber devices［J］.Optics Express,2001,9(13):698-713.

[25] [25] QI Wenzong,LIU Ying,LI Zhigang,et al.Comparison of calculated and measured diffractive efficiencies of UV aluminum blazed gratings［J］.Optics and Precision Engineering (China),2000,8(1):16-18.

[26] [26] MAYSTRE D,MCPHEDRAN R C.Theorem of reciprocity for gratings of finite conductivity-demonstration and applications［J］.Optics Communications,1974,12(2):164-167.

[27] [27] LI Yanlu,LI Lianyan,TIAN Bin,et al.Reflectionless tilted grating couplers with improved coupling efficiency based on a silicon overlay［J］.IEEE Photonics Technology Letters,2013,25(13):1195-1198.

[28] [28] MARCHETTI R,LACAVA C,CARROLL L,et al.Coupling strategies for silicon photonics integrated chips Invited［J］.Photonics Research,2019,7(2):201-239.

[29] [29] HUAI Yichen,SHAO Yuxu,KAI Chunyang.Design of a highly efficient uniform grating coupler with gradually etched grooves for silicon-on-insulator waveguides［J］.Symposium on Photonics and Optoelectronics(SOPO 2012),2012,4:955-958.

[30] [30] ZAOUI W S,KUNZE A,VOGEL W,et al.Bridging the gap between optical fibers and silicon photonic integrated circuits［J］.Optics Express,2014,22(2):1277-1286.

[31] [31] JIN Ge,LIU Weichen,YE Zonghao,et al.High efficiency polarization-independent slanted grating for RGB bands［J］.IEEE Photonics Journal,2021,13(4):1-8.

[32] [32] LU Yunkai,YU Junjie,YIN Zhengkun,et al.Polarization-independent multilayer slanted grating with high efficiency and broad spectral and angular bandwidths under normal incidence［J］.Acta Optica Sinica,2020,40(14):18-25.

[33] [33] WATANABE T,AYATA M,KOCH U,et al.Perpendicular grating coupler based on a blazed antiback-reflection structure［J］.Journal of Lightwave Technology,2017,35(21):4663-4669.

[34] [34] GAO Jian,CHEN Peng,WU Lei,et al.A review on fabrication of blazed gratings［J］.Journal of Physics D-Applied Physics,2021,54(31):313001-313015.

[35] [35] WEST P R,STEWART J L,KILDISHEV A V,et al.All-dielectric subwavelength metasurface focusing lens［J］.Optics Express,2014,22(21):26212-26221.

[36] [36] XU Jinbin,YANG Sipan,WU Liying,et al.Design and fabrication of a high-performance binary blazed grating coupler for perfectly perpendicular coupling［J］.Optics Express,2021,29(26):42999-3010.

[37] [37] ZHAO Zhexin,FAN Shanhui.Design principles of apodized grating couplers［J］.2021 Conference on Lasers and Electro-Optics (CLEO),2021,2:4435-4446.

[38] [38] DEZFOULI M K,GRINBERG Y,MELATI D,et al.Design of fully apodized and perfectly vertical surface grating couplers using machine learning optimization［C］// ［S.l.］:Proceedings of the Conference on Integrated Optics-Devices,Materials,and Technologies XXV,Electr Network,2021.

[39] [39] CAUCHETEUR C,GUO Tuan,ALBERT J.Review of plasmonic fiber optic biochemical sensors:improving the limit of detection［J］.Analytical and Bioanalytical Chemistry,2015,407(14):3883-3897.

[40] [40] ZHOU K M,SIMPSON G,CHEN X F,et al.High extinction ratio in-fiber polarizers based on 45 degrees tilted fiber Bragg gratings［J］.Optics Letters,2005,30(11):1285-1287.

[41] [41] WANG Tianxing,YAN Zzhijun,MOU Chengbo,et al.Stable nanosecond passively Q-switched all-fiber erbium-doped laser with a 45 degrees tilted fiber grating［J］.Applied Optics,2017,56(12):3583-3588.

[42] [42] ZOU Chuanhang,WANG Tianxing,YAN Zhijun,et al.Wavelength-tunable passively mode-locked Erbium-doped fiber laser based on carbon nanotube and a 45 degrees tilted fiber grating ［J］.Optics Communications,2018,406:151-157.

[43] [43] YANG Jinmin,LIN Yanlu,HUANG Qianqian,et al.Wavelength-tunable linearly polarized Yb-doped fiber laser based on tilted fiber grating［J］.Acta Optica Sinica,2020,40(3):101-108.

[44] [44] CHEN Yifang Nanofabrication by electron beam lithography and its applications:A review［J］.Microelectronic Engineering,2015,135:57-72.

[45] [45] LI Ming,SHEARD S J.Experimental study of waveguide grating couplers with parallelogramic tooth profiles［J］.Optical Engineering,1996,35(11):3101-3106.

[46] [46] MILLER J M,DEBEAUCOUDREY N,CHAVEL P,et al.Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection［J］.Applied Optics,1997,36(23):5717-5727.

[47] [47] YANG Liming,YU Shuhuan,XU Qiao,et al.Reactive ion beam etching for diffractive optical elements［J］.Acta Photonica Sinica (China),1998,27(2):147-51.

[48] [48] LEVOLA T,LAAKKONEN P.Replicated slanted gratings with a high refractive index material for in and outcoupling of light［J］.Optics Express,2007,15(5):2067-2074.

[49] [49] WANG Bin,JIANG Jianhua,NORDIN G P.Compact slanted grating couplers［J］.Optics Express,2004,12(15):3313-3326.

[50] [50] ZHOU Chuanhong,WANG Lei,WANG Zhiheng.Approaches to improve the calculating convergence of grating diffraction［J］.Acta Physica Sinica,2001,50(6):1046-1051.

[51] [51] BIENSTMAN P,BAETS R.Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers［J］.Optical and Quantum Electronics,2001,33(4/5):327-341.

[52] [52] VERMEULEN D,DE KONINCK Y,LI Y,et al.Reflectionless grating couplers for Silicon-on-Insulator photonic integrated circuits［J］.Optics Express,2012,20(20):22278-22283.

[53] [53] CHEN Xia,LI Chao,FUNG C K Y,et al.Apodized waveguide grating couplers for efficient coupling to optical fibers［J］.IEEE Photonics Technology Letters,2010,22(15):1156-1158.

[54] [54] HARRISON G R.The production of diffraction gratings: I.development of the ruling art［J］.Journal of the Optical Society of America,1949,39(6):413-426.

[55] [55] SMUK A Y,LAWANDY N M.Direct laser writing of diffractive optics in glass［J］.Optics Letters,1997,22(13):1030-1032.

[56] [56] GALE M T,ROSSI M,PEDERSEN J,et al.Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists［J］.Optical Engineering,1994,33(11):3556-566.

[57] [57] MOUROULIS P,HARTLEY F T,WILSON D W,et al.Blazed grating fabrication through gray-scale X-ray lithography［J］.Optics Express,2003,11(3):270-281.

[58] [58] SHERIDON N K.Production of blazed holograms ［J］.Appl Phys Lett,1968,12(9):316-318.

[59] [59] BREIDNE M,JOHANSSON S,NILSSON L E,et al.Blazed holographic gratings［J］.Optica Acta,1979,26(11):1427-1441.

[60] [60] MCPHEDRAN R C,WATERWORTH M D.Properties of diffraction gratings anomalies［J］.Optica Acta,1973,20(7):533-547.

[61] [61] AOYAGI T,AOYAGI Y,NAMBA S.High-efficiency blazed grating couplers［J］.Applied Physics Letters,1976,29(5):303-304.

[62] [62] JOHNSON L F,INGERSOLL K A.Asymmetric triangular grating profiles with 90-degrees groove angles produced by ion-beam erosion［J］.Applied Optics,1981,20(17):2951-2961.

[63] [63] SANO K,AOYAGI Y,NAMBA S.Production of blazed holographic gratings by ion-etching technique［J］.Journal of the Spectroscopical Society of Japan,1977,26(6):327-334.

[64] [64] AOYAGI Y,NAMBA S.Blazed ion-etched holographic gratings［J］.Optica Acta,1976,23(9):701-707.

[65] [65] OSTERRIED K,HEIDEMANN K F,NELLES B.Groove profile modification of blazed gratings by dip coating with hardenable liquids［J］.Applied Optics,1998,37(34):8002-8007.

[66] [66] FU Y Q,NGOI B K A.Virtual gray-scale mask for fabrication of micro-optical elements via focused ion beam direct writing［J］.Optical Engineering,2005,44(12):128002-128007.

[67] [67] MATTELIN M A,RADOSAVLJEVIC A,MISSINNE J,et al.Design and fabrication of blazed gratings for a waveguide-type head mounted display［J］.Optics Express,2020,28(8):11175-11190.

[68] [68] SU L,TRIVEDI R,SAPRA N V,et al.Fully-automated optimization of grating couplers［J］.Optics Express,2018,26(4):4023-4034.

[69] [69] LALANNE P,ASTILEAN S,CHAVEL P,et al.Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff［J］.Journal of the Optical Society of America Optics Image Science and Vision,1999,16(5):1143-1156.

[70] [70] HAIDNER H,SHERIDAN J T,STREIBL N.Dielectric binary blazed gratings［J］.Applied Optics,1993,32(22):4276-4278.

[71] [71] LALANNE P.Waveguiding in blazed-binary diffractive elements［J］.Journal of the Optical Society of America Optics Image Science and Vision,1999,16(10):2517-2520.

[72] [72] SANDFUCHS O,BRUNNER R,PATZ D,et al.Rigorous analysis of shadowing effects in blazed transmission gratings［J］.Optics Letters,2006,31(24):3638-3640.

[73] [73] ZHENG Zhizhong,YANG Zhong,XIU Liancun.Development and application of shortwave infrared convex blazed grating with high diffraction efficiency［J］.Acta Optica Sinica,2020,40(12):53-61.

[74] [74] SALIK M D,CHAVEL P.Resonant excitation analysis of waveguide grating couplers［J］.Optics Communications,2001,193(1/6):127-131.

[75] [75] FENG Junbo,ZHOU Zhiping.High efficiency compact grating coupler for integrated optical circuits［C］//South Korea:Proceedings of the Conference on Passive Components and Fiber-Based Devices III,2006.

[76] [76] STUERZEBECHER L,FUCHS F,HARZENDORF T,et al.Application of rigorously optimized phase masks for the fabrication of binary and blazed gratings with diffractive proximity lithography［C］//San Francisco,CA:Proceedings of the Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII,2014.

[77] [77] BEHRMANN G P,DUIGNAN M T.Excimer laser micromachining for rapid fabrication of diffractive optical elements［J］.Applied Optics,1997,36(20):4666-4674.

[78] [78] BURMEISTER F,FLUGEL-PAUL T,ZEITNER U D,et al.Binary blazed reflection grating for UV/VIS/NIR/SWIR spectral range［C］//Greece:Proceedings of the International Conference on Space Optics (ICSO),2018.

[79] [79] NA N,FRISH H,HSIEH I W,et al.Efficient broadband silicon-on-insulator grating coupler with low backreflection［J］.Optics Letters,2011,36(11):2101-2103.

[80] [80] ALONSO-RAMOS C,ORTEGA-MONUX A,MOLINA-FERNANDEZ I,et al.Efficient fiber-to-chip grating coupler for micrometric SOI rib waveguides［J］.Optics Express,2010,18(14):15189-15200.

[81] [81] ALONSO-RAMOS C,ORTEGA-MONUX A,ZAVARGO-PECHE L,et al.Single-etch grating coupler for micrometric silicon rib waveguides ［J］.Optics Letters,2011,36(14):2647-2649.

[82] [82] BOZZOLA A,CARROLL L,GERACE D,et al.Optimising apodized grating couplers in a pure SOI platform to-0.5 dB coupling efficiency［J］.Optics Express,2015,23(12):16289-16304.

[83] [83] MARCHETTI R,LACAVA C,KHOKHAR A,et al.High-efficiency grating-couplers:demonstration of a new design strategy［J］.Scientific Reports,2017,7(1): 1-8.

[84] [84] LUO Xiangyu,MI Guangcan,LI Yanbo,et al.High-efficiency grating coupler based on fast directional optimization and robust layout strategy in 130 nm CMOS process ［J］.Optics Letters,2022,47(7):1622-1625.

[85] [85] TSENG H L,CHEN E,RONG H S,et al.High-performance silicon-on-insulator grating coupler with completely vertical emission［J］.Optics Express,2015,23(19):24433-24439.

[86] [86] TAILLAERT D,VAN LAERE F,AYRE M,et al.Grating couplers for coupling between optical fibers and nanophotonic waveguides［J］.Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers,2006,45(8A):6071-6077.

[87] [87] ZAOUI W S,KUNZE A,VOGEL W,et al.CMOS-compatible polarization splitting grating couplers with a backside metal mirror［J］.IEEE Photonics Technology Letters,2013,25(14):1395-1397.

[88] [88] TAILLAERT D,BIENSTMAN P,BAETS R.Compact efficient broadband grating coupler for silicon-on-insulator waveguides［J］.Optics Letters,2004,29(23):2749-2751.

[89] [89] VAN LAERE F,ROELKENS G,AYRE M,et al.Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides ［J］.Journal of Lightwave Technology,2007,25(1):151-156.

[90] [90] DING Yunhong,PEUCHERET C,OU Haiyan,et al.Fully etched apodized grating coupler on the SOI platform with-0.58 dB coupling efficiency［J］.Optics Letters,2014,39(18):5348-5350.

[91] [91] VERMEULEN D,SELVARAJA S,VERHEYEN P,et al.High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform ［J］.Optics Express,2010,18(17):18278-18283.

[92] [92] ROELKENS G,VERMEULEN D,VAN THOURHOUT D,et al.High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit ［J］.Appl Phys Lett,2008,92(13):131101-131104.

[93] [93] SAHA T K,ZHOU Weidong.High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide［J］.J Phys D-Appl Phys,2009,42(8):085115-085124.

[94] [94] YANG Shuyun,ZHANG Yi,BAEHR-JONES T,et al.High efficiency germanium-assisted grating coupler［J］.Optics Express,2014,22(25):30607-30612.

[95] [95] WANG Bin,JIANG Jianhua,NORDIN G P.Embedded,slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides ［J］.IEEE Photonics Technology Letters,2005,17(9):1884-1886.

[96] [96] SCHRAUWEN J,VAN LAERE F,VAN THOURHOUT D,et al.Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides［J］.IEEE Photonics Technology Letters,2007,19(9/12):816-818.

[97] [97] ALONSO-RAMOS C,CHEBEN P,ORTEGA-MONUX A,et al.Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95%［J］.Optics Letters,2014,39(18):5351-5354.

[98] [98] BENEDIKOVIC D,ALONSO-RAMOS C,CHEBEN P,et al.High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure ［J］.Optics Letters,2015,40(18):4190-4193.

[99] [99] BOGAERTS W,TAILLAERT D,DUMON P,et al.A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires［J］.Optics Express,2007,15(4):1567-1578.

[100] [100] LACAVA C,CARROLL L,BOZZOLA A,et al.Design and characterization of low-loss 2D grating couplers for silicon photonics integrated circuits［C］//San Francisco,CA:Proceedings of the Conference on Silicon Photonics XI,2016.

[101] [101] CARROLL L,GERACE D,CRISTIANI I,et al.Broad parameter optimization of polarization-diversity 2D grating couplers for silicon photonics ［J］.Optics Express,2013,21(18):21556-21568.

[102] [102] LUO Yannong,NONG Zhichao,GAO Shengqian,et al.Low-loss two-dimensional silicon photonic grating coupler with a backside metal mirror［J］.Optics Letters,2018,43(3):474-477.

[103] [103] HU Hui,YANG Jin,GUI Li,et al.Lithium niobate-on-insulator (LNOI):Status and perspectives［C］//Brussels,Belgiulgium:Proceedings of the Conference on Silicon Photonics and Photonic Integrated Circuits III,2012,8431:268-275

[104] [104] LIU Yian,YAN Xiongshuo,WU Jiangwei,et al.On-chip erbium-doped lithium niobate microcavity laser［J］.Science China-Physics Mechanics & Astronomy,2021,64(3):234262-234267.

[105] [105] LUO Qiang,BO Fang,KONG Yongfa,et al.Research progresses of microcavity lasers based on lithium niobate on insulator (Invited)［J］.Infrared and Laser Engineering,2021,50(11):53-65.

[106] [106] HAN Huangpu,XIANG Bingxi.Grating coupler design for vertical lght coupling in silicon thin films on lithium niobate［J］.Crystals,2020,10(9):850-858.

[107] [107] CHEN Zhihua,PENG Ruihong,WANG Yiwen,et al.Grating coupler on lithium niobate thin film waveguide with a metal bottom reflector［J］.Optical Materials Express,2017,7(11):4010-4017.

[108] [108] CHEN Zhihua,WANG Yiwen,JIANG Yunpeng,et al.Grating coupler on single-crystal lithium niobate thin film［J］.Optical Materials,2017,72: 136-139.

[109] [109] YANG Sipan,LI Yaqian,XU Jinbin,et al.Sub-wavelength gratings assisted ridge waveguide surface couplers on lithium niobate thin film［C］//［S.l.］:Proceedings of the Optical Fiber Communications Conference and Exhibition(OFC),Electr Network,2021.

[110] [110] KRASNOKUTSKA I,CHAPMAN R J,TAMBASCO J L J,et al.High coupling efficiency grating couplers on lithium niobate on insulator［J］.Optics Express,2019,27(13):17681-17685.

[111] [111] KRASNOKUTSKA I,TAMBASCO J L J,LI X J,et al.Ultra-low loss photonic circuits in lithium niobate on insulator［J］.Optics Express,2018,26(2):887-894.

[112] [112] CAI Lutong,HAN Huangpu P,ZHANG Shaomei,et al.Photonic crystal slab fabricated on the platform of lithium niobate-on-insulator［J］.Optics Letters,2014,39(7):2094-2096.

[113] [113] WANG Cheng,ZHANG Mian,STERN B,et al.Nanophotonic lithium niobate electro-optic modulators ［J］.Optics Express,2018,26(2):1547-1555.

[114] [114] YANG Chengjunyi, XU Jun, GAO Yang, et al.Improved design of a silicon based grating coupler for antenna’s fiber chip coupling［J］.Journal of Ordnance Equipment Engineering,2020,41(10):249-254.

[115] [115] WANG Jie,BO Fang,WAN Shuai,et al.High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation［J］.Optics Express,2015,23(18):23072-23078.

[116] [116] WANG Cheng,BUREK M J,LIN Z,et al.Integrated high quality factor lithium niobate microdisk resonators［J］.Optics Express,2014,22(25):30924-30933.

[117] [117] LIN Jintian,XU Yingxin,FANG Zhiwei,et al.Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining［J］.Scientific Reports,2015,5(1):8072-8076.