Microelectronics, Volume. 55, Issue 1, 140(2025)

A Novel Self-clamping P-shield Low Specific On-resistance SiC MOSFET

KONG Moufu, ZHAO Liang, AI Zhaoyu, CHENG Zeyu, and DENG Hongfei
Author Affiliations
  • State Key Lab of Elec Thin Films and Integr Dev, Univ of Elec Sci and Technol of China, Chengdu 610054, P R China
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    This paper presents a novel trench SiC power MOSFET device with an inherent self-biased PMOS for clamping the potential of the P-shield region at the bottom of the gate trench. The integrated PMOS has the P-shield region at the bottom of the trench serving as the source, the P+ source region as the drain, and the source metal filling the trench acting as the gate, with the gate and drain being short-circuited. By utilizing the clamping effect of this PMOS, the potential of the P-shield region at the bottom of the gate trench can be regulated. When the device is on, the PMOS is cut off, allowing the P-shield region to float, thereby improving the JFET effect in the channel region of the SiC MOSFET and reducing the specific on-resistance (Ron, sp) of the device. When the device is under high drain voltage, the self-biased PMOS turns on, clamping the potential of the P-shield region, thus enhancing the electric field shielding effect of the P-shield region on the gate oxide layer and improving the reliability of the device. Simulation results show that the proposed device has a breakdown voltage (BV) of 1 430 V and a Ron, sp of 1.70 mΩ‧cm2, exhibiting comparable BV and improved Ron, sp compared to conventional devices. The gate-drain charge and high-frequency figure of merit are enhanced by more than 14.3% and 20%, respectively. Additionally, the proposed device has a lower gate oxide E-field than conventional devices.

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    KONG Moufu, ZHAO Liang, AI Zhaoyu, CHENG Zeyu, DENG Hongfei. A Novel Self-clamping P-shield Low Specific On-resistance SiC MOSFET[J]. Microelectronics, 2025, 55(1): 140

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    Paper Information

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    Received: Oct. 17, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240374

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