Chinese Journal of Lasers, Volume. 44, Issue 9, 903002(2017)
Preparation of Short and Medium Wave Infrared Anti-Reflective Coating Based on Chalcogenide Glass
Figures & Tables(16)
Fig. 3. Picture of coating stripping. (a) Single-layer ZnS; (b) single-layer YbF3
Fig. 7. Surfaces curvature of before and after coating tested by the step meter. (a) Before coating; (b) after coating
Fig. 10. Transmittance curve of both sides in actual test. (a) 1.4~2.5 μm; (b) 3.5~4.5 μm
Fig. 11. Transmittance curve of both sides in actual test. (a) 1.4~2.5 μm; (b) 3.5~4.5 μm
Table 1. Technical parameters of anti-reflective coating
View tableTable 1. Technical parameters of anti-reflective coating
Parameter Specification Substrate TI-1173 Incident angle /(°) 0 Spectrum range /nm 1400-2500 3500-4500 Transmittance /% >95 >95
Table 2. Several groups of experiments
View tableTable 2. Several groups of experiments
Heating Annealing Experimental phenomenon No No Coating stripping Yes No Coating stripping No Yes Coating stripping Yes Yes Coating stripping
Table 3. Thermal and mechanical parameters of thin films
View tableTable 3. Thermal and mechanical parameters of thin films
Material Thermal expansion /(10-6 K-1) Young's modulus /GPa Thermal stress /(108 Pa) BaF2 18.40 65 -0.414 YbF3 10.80 76 2.667 Al2O3 5.00 230 2.507 ZnS 7.85 74 5.208 MgO 10.50 248.74 -3.626
Table 4. Deposition process parameters of M-11, ZnS and YbF3
View tableTable 4. Deposition process parameters of M-11, ZnS and YbF3
Material Substrate temperature /℃ Filling gas Degree of vacuum /Pa Deposition rate /(nm·s-1) Ion source anode current /A Ion source anode voltage /V M-11 150 O2 1.5×10-2 0.5 5 180 ZnS 150 Ar 1.5×10-2 0.7 5 180 YbF3 150 Ar 1.5×10-2 0.8 5 180
Table 5. Residual deposition and its average value of the four experimental results
View tableTable 5. Residual deposition and its average value of the four experimental results
Number of layers Residual deposition Experiment 1 Experiment 2 Experiment 3 Experiment 4 Average value 1 0.5 0.7 0.7 0.6 0.625 2 0.4 0.5 0.5 0.5 0.475 3 0.8 0.6 0.4 0.5 0.575 4 0.6 0.7 0.4 0.4 0.525 5 0.6 0.5 0.4 0.7 0.55 6 0.6 0.5 0.6 0.5 0.55 7 0.5 0.7 0.5 0.5 0.55 8 0.6 0.5 0.6 0.6 0.575 9 0.6 0.5 0.8 0.5 0.6 10 0.5 0.8 0.5 0.5 0.575 11 0.8 0.6 0.6 0.5 0.625 12 0.5 0.5 0.5 0.6 0.525 13 0.6 0.6 0.7 0.4 0.575 14 0.6 0.6 0.5 0.5 0.55 15 0.7 0.7 0.7 0.5 0.65 16 0.6 0.6 0.5 0.5 0.55
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Fu Xiuhua, Jiang Hongyan, Zhang Jing, Xiong Shifu, Guo Kai, Sun Bing. Preparation of Short and Medium Wave Infrared Anti-Reflective Coating Based on Chalcogenide Glass[J]. Chinese Journal of Lasers, 2017, 44(9): 903002
Paper Information
Category: materials and thin films
Received: May. 2, 2017
Accepted: --
Published Online: Sep. 7, 2017
The Author Email: Xiuhua Fu (goptics@126.com)
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