Opto-Electronic Engineering, Volume. 35, Issue 12, 45(2008)

Laser Damage Properties and Process Optimization of Diamond-like Carbon Thin Films

XU Jun-qi1,2、*, FAN Hui-qing1, LIU Wei-guo2, and SU Jun-hong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    [1] [1] Kaiser N,Uhlig H,Schallenberg U B,et al.High damage threshold Al2O3/SiO2 dielectric coatings for excimer lasers[J].Thin Solid Films,1995,260:86-92

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    [3] [3] Loewenthal F,Tommasini R,Balmer J E.Single-shot measurement of laser-induced damage thresholds of thin film coatings[J].Optics Communications,1998,152:168-174

    [6] [6] ISO 11254-l.Laser and laser-related equipment-Determination of laser-induced damage threshold of optical surface,Part 1:1-on-1 test[S]

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    XU Jun-qi, FAN Hui-qing, LIU Wei-guo, SU Jun-hong. Laser Damage Properties and Process Optimization of Diamond-like Carbon Thin Films[J]. Opto-Electronic Engineering, 2008, 35(12): 45

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    Paper Information

    Category:

    Received: Apr. 14, 2008

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Jun-qi XU (jqxu2210@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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