Study for infrared spectroscopic ellipsometric properties of diamond films

Linjun Wang; Yiben Xia; Hujiang Shen; Minglong Zhang; Ying Yang; Lin Wang

Chinese Optics Letters, Volume. 2, Issue 5, 05308(2004)

Linjun Wang^1,2、*, Yiben Xia^1,2, Hujiang Shen^1,2, Minglong Zhang^1,2, Ying Yang^1,2, and Lin Wang^1,2

Author Affiliations

¹School of Materials Science &

²Engineering, Shanghai University, Shanghai 201800

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References(9)

[1] [1] F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

[2] [2] Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

[3] [3] K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

[4] [4] L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

[5] [5] P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

[6] [6] J. C. Comfort, Annual Simulation Symposium (Society for Computer Simulation, New York, 1987) p. 185.

[7] [7] Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

[8] [8] Z. J. Fang, Y. B. Xia, L. J. Wang, Z. W. Wang, W. L. Zhang, and Y. M. Fan, J. Phys. D: Appl. Phys. 35, L57 (2002).

[9] [9] D. A. G. Bruggeman, Ann. Phys. 5, 636 (1935).

CLP Journals

[1] Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen, "Accurate analysis of ellipsometric data for thick transparent f ilms," Chin. Opt. Lett. 9, 053101 (2011)

[2] [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Advance of Optical Chemical Vapor Deposition Diamond Thin Films[J]. Laser & Optoelectronics Progress, 2006, 43(7): 22

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Linjun Wang, Yiben Xia, Hujiang Shen, Minglong Zhang, Ying Yang, Lin Wang, "Study for infrared spectroscopic ellipsometric properties of diamond films," Chin. Opt. Lett. 2, 05308 (2004)

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Paper Information

Category:

Received: Sep. 23, 2003

Accepted: --

Published Online: Jun. 6, 2006

The Author Email: Linjun Wang (ljwang@mail.shu.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology