Opto-Electronic Engineering, Volume. 38, Issue 12, 28(2011)
Design of Electromechanical characteristics Measuring System for MEMS Scanner
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LIU Yao-bo, YUAN Wei-zheng, QIAO Da-yong, YAN Bin. Design of Electromechanical characteristics Measuring System for MEMS Scanner[J]. Opto-Electronic Engineering, 2011, 38(12): 28
Paper Information
Category:
Received: Sep. 2, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Yao-bo LIU (liuyaobo2000@163.com)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20