Researching | Evolution and Updates of Advanced Photolithography Technology

Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922006(2022)

Evolution and Updates of Advanced Photolithography Technology

Yanli Li... Xianhe Liu and Qiang Wu* |Show fewer author(s)

Author Affiliations

School of Microelectronics, Fudan University, Shanghai 201203, China

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References (44)

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References(44)

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Yanli Li, Xianhe Liu, Qiang Wu. Evolution and Updates of Advanced Photolithography Technology[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922006

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Paper Information

Category: Optical Design and Fabrication

Received: Mar. 22, 2022

Accepted: Apr. 11, 2022

Published Online: May. 10, 2022

The Author Email: Qiang Wu (wu_qiang@fudan.edu.cn)

DOI:10.3788/LOP202259.0922006

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology