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Acta Optica Sinica, Volume. 36, Issue 8, 811001(2016)

Pixelated Source Mask Optimization Based on Multi Chromosome Genetic Algorithm

Yang Chaoxing1,2、*, Li Sikun1,2, and Wang Xiangzhao1,2
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    Yang Chaoxing, Li Sikun, Wang Xiangzhao. Pixelated Source Mask Optimization Based on Multi Chromosome Genetic Algorithm[J]. Acta Optica Sinica, 2016, 36(8): 811001

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    Paper Information

    Category: Imaging Systems

    Received: Feb. 2, 2016

    Accepted: --

    Published Online: Aug. 18, 2016

    The Author Email: Yang Chaoxing (yangcoloy@siom.ac.cn)

    DOI:10.3788/aos201636.0811001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology