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Piezoelectrics & Acoustooptics, Volume. 42, Issue 2, 252(2020)

Design andTest of Two way Driven Compliant Structure Micro motion Stage

LUO Zhanpeng, LI Guoping, HAN Tongpeng, YANG Yiling, and LAI Wenfeng
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    LUO Zhanpeng, LI Guoping, HAN Tongpeng, YANG Yiling, LAI Wenfeng. Design andTest of Two way Driven Compliant Structure Micro motion Stage[J]. Piezoelectrics & Acoustooptics, 2020, 42(2): 252

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    Paper Information

    Received: Oct. 18, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10-11977/j.issn.1004-2474.2020-02-024

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology