Piezoelectrics & Acoustooptics, Volume. 42, Issue 2, 252(2020)
Design andTest of Two way Driven Compliant Structure Micro motion Stage
In response to the requirements of micro nano manipulating technology for large stroke, high precision, multi degree of freedom and output displacement decoupling of micro motion stage, a xy two degree of freedom two way driven micro motion stage based on two stage amplification mechanism is designed. The motion and amplification principle of the micro motion stage were analyzed, and the theoretical models and finite element models of the micro motion stage were established and tested. The test results of the stage output characteristics showed that the magnification of the micro motion stage can be up to 8.5 times, the error with the simulation value is 6.9%,and the coupling displacement is controlled within 0.82%. The stage was driven by a 150 V triangle wave signal, and the positive and negative output displacements in the x direction are 84.6 μm and -84.2 μm respectively, and the positive and negative output displacement in the y direction are 85.0 μm (-84.5 μm respectively. The maximum displacement at different frequencies fluctuates only in a very small range, and the positive/negative outputs in x and y directions have high similarity and stability. The targets of two way driving, large stroke, and high precision have been realized.
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LUO Zhanpeng, LI Guoping, HAN Tongpeng, YANG Yiling, LAI Wenfeng. Design andTest of Two way Driven Compliant Structure Micro motion Stage[J]. Piezoelectrics & Acoustooptics, 2020, 42(2): 252
Received: Oct. 18, 2019
Accepted: --
Published Online: Apr. 21, 2022
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