Chinese Journal of Lasers, Volume. 52, Issue 10, 1004003(2025)
In‐situ Wavefront Aberration Measurement and Alignment of Optical Systems Using Vision Ray Calibration Deflectometry
Fig. 3. Wavefront aberration results and error of the RC system. (a) Theoretical calculation result; (b) vision ray calibration calculation result; (c) difference between them
Fig. 5. Wavefront aberration results and error after adding the actual surf to the RC system primary mirror. (a) Theoretical calculation result; (b) vision ray calibration calculation result; (c) difference between them; (d) comparison of the Zernike coefficients of them
Fig. 6. Off-axis aberration analysis caused by secondary mirror offset in RC system. (a) X-direction decenter; (b) Y-direction decenter; (c) X-direction tilt; (d) Y-direction tilt
Fig. 8. Measurement and alignment of RC system. (a) Screws for alignment of secondary mirror; (b) fringe pattern of RC system
Fig. 9. Measurement results of the RC system before and after alignment. (a)‒(c) Measurement result before alignments with the first four、six and seven terms removed of Zernike polynomials; (d)‒(f) measurement result after alignments with the first four, six and seven terms removed of Zernike polynomials.
Fig. 10. Result of the alignments. (a) Result of aberration measurement; (b) coma and astigmatism decrease with alignments
Fig. 11. Measurement and alignment of the plano-convex lens. (a) Five-dimensional alignment base; (b) fringe pattern of the plano-convex lens
Fig. 12. Measurement results of the plano-convex lens before and after alignments. (a)‒(c) Measurement result before alignments with the first three, five and seven terms removed of Zernike polynomials; (d)‒(f) measurement result after alignments with the first three, five and seven terms removed of Zernike polynomials
Fig. 15. Comparison of wavefront aberration results. (a) Vision ray calibration measurement result; (b) interferometer measurement result
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Wei Hu, Ruiyang Wang, Dahai Li, Zekun Zhang, Renhao Ge, Yu Feng. In‐situ Wavefront Aberration Measurement and Alignment of Optical Systems Using Vision Ray Calibration Deflectometry[J]. Chinese Journal of Lasers, 2025, 52(10): 1004003
Category: Measurement and metrology
Received: Nov. 1, 2024
Accepted: Jan. 14, 2025
Published Online: May. 8, 2025
The Author Email: Ruiyang Wang (rywang@scu.edu.cn), Dahai Li (lidahai@scu.edu.cn)
CSTR:32183.14.CJL241309