Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon

Jinyue Peng; Yuxuan Yang; Yang Zhang; Xinlu Xue; Bochen Lu; Rong Qin; Haijun Wu

doi:10.1142/S2010135X2440006X

Journal of Advanced Dielectrics, Volume. 14, Issue 3, 2440006(2024)

Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon

Jinyue Peng¹, Yuxuan Yang¹, Yang Zhang^1,3、*, Xinlu Xue², Bochen Lu¹, Rong Qin^2、**, and Haijun Wu¹

¹State Key Laboratory for Mechanical Behavior of Materials, Electronic Materials Research Laboratory, (Key Lab of Education Ministry) and School of Electronic and Information Engineering, Xi’an Jiaotong University, 710049 Xi’an, China

²Qinghai Xince Technology Co., Ltd., Huanghe Hydropower, Development Co., Ltd., 810007 Xining, China

³Instrumental Analysis Center, Xi’an Jiaotong University, Xi’an, China

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Jinyue Peng, Yuxuan Yang, Yang Zhang, Xinlu Xue, Bochen Lu, Rong Qin, Haijun Wu. Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon[J]. Journal of Advanced Dielectrics, 2024, 14(3): 2440006

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Paper Information

Category: Research Articles

Received: Jan. 28, 2024

Accepted: Feb. 18, 2024

Published Online: Jul. 22, 2024

The Author Email: Yang Zhang (zhangyang2020@xjtu.edu.cn), Rong Qin (qinrong@spic.com.cn)

DOI:10.1142/S2010135X2440006X

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology