Journal of Synthetic Crystals, Volume. 50, Issue 2, 296(2021)
Effects of Substrate Heating Temperature and Post-Annealing Temperature on the Preparation of β-Ga2O3 Thin Films by Magnetron Sputtering
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
GAO Cancan, JI Kaidi, MA Kui, YANG Fashun. Effects of Substrate Heating Temperature and Post-Annealing Temperature on the Preparation of β-Ga2O3 Thin Films by Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2021, 50(2): 296
Paper Information
Category:
Received: Dec. 14, 2020
Accepted: --
Published Online: Mar. 30, 2021
The Author Email: Cancan GAO (403015906@qq.com)
CSTR:32186.14.
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20