Chinese Optics, Volume. 17, Issue 6, 1397(2024)

Design of an angle measurement system based on interferometric fringe imaging and its off-axis measurement accuracy

Ying SONG1,2 and Yu-juan LIU2、*
Author Affiliations
  • 1School of Electronics and Computer, Jilin Jianzhu University, Changchun 130119, China
  • 2College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130061, China
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    Figures & Tables(7)
    (a) Structural diagram and (b) topology of optical angle measurement system based on interferometric fringe imaging
    Schematic diagram of the effect of a single optical wedge on the beam angle
    Schematic diagram of double grating shear interference
    Distribution of the sub-image spots and the target image spot
    Coordinate offsets errors of the image spots
    Coordinate error of the target image spot
    Phase deviation under different coordinate changes
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    Ying SONG, Yu-juan LIU. Design of an angle measurement system based on interferometric fringe imaging and its off-axis measurement accuracy[J]. Chinese Optics, 2024, 17(6): 1397

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    Paper Information

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    Received: Mar. 13, 2024

    Accepted: Jun. 25, 2024

    Published Online: Jan. 14, 2025

    The Author Email:

    DOI:10.37188/CO.2024-0049

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