Optics and Precision Engineering, Volume. 27, Issue 1, 129(2019)
Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate
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XU Ping, HUANG Yan-yan, ZHANG Xu-lin, YANG Wei, PENG Wen-da. Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate[J]. Optics and Precision Engineering, 2019, 27(1): 129
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Received: Jun. 26, 2018
Accepted: --
Published Online: Apr. 6, 2019
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