Fig. 1. Schematic diagram of the analysis model of scratches and polished particle

Fig. 2. Effect of polishing particles on the light field distribution of the material surface at different positions in the width direction of the scratch

Fig. 3. Effect of polishing particles on the light field modulation (a) and thermal damage threshold (b) at different locations of the scratch width

Fig. 4. Effect of polishing particles on the light field modulation (a) and thermal damage threshold (b) at different locations of the scratch length

Fig. 5. Effect of polishing particles with different radii on light field modulation (a) and thermal damage threshold (b)