Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors

Fengli Wang; Zhanshan Wang; Jingtao Zhu; Zhong Zhang; Wenjuan Wu; Shumin Zhang; Lingyan Chen

Chinese Optics Letters, Volume. 4, Issue 9, 550(2006)

Fengli Wang^*, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen

Author Affiliations

Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092

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CLP Journals

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[2] Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu, "Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range," Chin. Opt. Lett. 9, 023102 (2011)

[3] Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen, "Intrinsic stress analysis of sputtered carbon film," Chin. Opt. Lett. 6, 384 (2008)

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Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen, "Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors," Chin. Opt. Lett. 4, 550 (2006)

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Paper Information

Received: Feb. 27, 2006

Accepted: --

Published Online: Sep. 14, 2006

The Author Email: Fengli Wang (wangzs@mail.tongji.edu.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology