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Opto-Electronic Engineering, Volume. 31, Issue 2, 4(2004)

Research on Etching Properties of Polycarbonate by KrF Excimer Laser

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [2] [2] KRUGER J.Investigation of excimer laser ablation threshold of polymers using a microphone[J].Applied Surface Science 2002,197-198(1-4):800-804.

    [4] [4] SHARIFF G,SATHYANARAYANA P M.Positron lifetime study of diffusion kinetics in electron irradiated polycarbonate[J].Polymer Degradation and Stablity,2002,76(2):265-273.

    [7] [7] SATO H,NISHIO S.Polymer laser photochemistry,ablation,reconstruction,and polymerization[J].Journal of Photochemistry and Photobiology C:Photochemistry Reviews,2001,2(2):139-152.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on Etching Properties of Polycarbonate by KrF Excimer Laser[J]. Opto-Electronic Engineering, 2004, 31(2): 4

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    Paper Information

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    Received: Aug. 29, 2003

    Accepted: --

    Published Online: Nov. 14, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology