[3] SHI Z Y, ZHANG B, FEI Y T. Re⁃visit to the Abbe principle. Chinese Journal of Scientific Instrument, 1128-1133(2012).

[4] JIAO J. Measurement technology for comprehensive stroke error of ball screw pairs. Manufacturing Technology & Machine Tools, 30-32(1997).

[5] SONG X C, YU F S, AI X et al. Microcomputer based transformation of ball screw laser dynamic inspection instrument. Tool Technology, 46-47(2003).

[6] JIAO J. Technical study of 14.5 m ultra precision granite guide. Manufacturing Technology & Machine Tools, 107-110(2013).

[7] JIAO J, MEI J D, LIU R H et al. Measurement techno⁃logy for dynamic pre tightening torque of ball screw pair. Manufacturing Technology & Machine Tools, 35-36(1998).

[8] JIAO S S. Development of a dynamic pre tightening torque measuring instrument for micro ball screw pairs. World Manufacturing Technology and Equipment Market, 86-90(2021).

[9] XIAO Z Y, JIAO J. Development and test of high speed ball screw units. Manufacturing Technology & Machine Tools, 95-98(2004).

[10] SONG X C, ZHANG Q, SUN X et al. Research on dynamic detecting system of ball screw helical line error based on FPGA. Journal of Shandong Jianzhu University, 27-30(2008).

[11] YANG X, TAO W J, HAN J et al. Study on precision detection method of ball screws under the simulated condition. Modular Machine Tool ＆ Automatic Manufacturing Technique, 2016, 78-80， 85.

[12] JIAO J, XIAO Z Y. Development of laser dynamic travel testers for 12 m ball screws. Manufacturing Techno⁃logy & Machine Tools, 72-77(2013).

[14] MIAO D J, LI J S, LI L F et al. Research on abbe error elimination method for large length laser measurement. Acta Metrologica Sinica, 36, 570-574(2015).

[15] WANG L L, SHANG Z J, YANG H M et al. Error analysis of laser interferometrie displacement measurement based on cube⁃corner prism. Computer Measurement & Control, 30, 60-66(2022).